Advanced Energy(R) Awarded Design Win by Leading Provider of Semiconductor CVD Equipment AE(R)'s Sekidenko Temperature and Emissivity Instrumentation Enables

Precise, Repeatable Volume Production for sub-90-nm Devices



    FORT COLLINS, Colo., May 16 /PRNewswire-FirstCall/ -- Advanced Energy
 Industries, Inc. (Nasdaq:   AEIS) today announced it has secured a design win
 for its Sekidenko temperature and emissivity instrumentation from a leading
 provider of chemical vapor deposition (CVD) equipment for semiconductor
 manufacturing. The Sekidenko instruments provide advanced, multi-channel
 temperature measurement for use in sub-90-nm low-k dielectric film and
 high-stress silicon nitride cures. The innovative, integrated solution
 benefits the customer by providing enhanced wafer-to-wafer uniformity and
 improved overall process yield. This design win highlights AE's strong
 ability to develop application-specific solutions that address important
 technology issues affecting the success of its customers.
     (Logo: http://www.newscom.com/cgi-bin/prnh/20030825/AEISLOGO )
     AE's thermal instrumentation technology offers in-situ, non-contact
 optical fiber thermometer (OFT) capability with real-time emissivity
 compensation. For sub-90-nm applications, AE's Sekidenko instrumentation
 delivers the high stability, exceptional repeatability and precision
 required for advanced, volume-production environments.
     "This design win demonstrates AE's talent for addressing our customers'
 process concerns with innovative technology," noted Dr. Hans Betz, AE
 president and CEO. "Applying our broad application expertise in thermal
 instrumentation, we worked in partnership with this customer to build an
 application-specific temperature and emissivity solution that optimizes
 their process. As we grow our position in this core semiconductor market,
 we continue to proactively listen to our customers to help them gain
 competitive advantages with our solutions."
     Sekidenko Optical Fiber Thermometers (OFTs)
     AE's Sekidenko optical fiber thermometers (OFT) with real-time
 emissivity compensation are in-situ, non-contact instruments that enable
 customers to improve within-wafer and wafer-to-wafer temperature
 uniformity. Further, AE's custom, thermal-instrumentation application
 consulting includes heat-transfer design analysis, extensive material
 evaluation and custom interface solutions.
     About Advanced Energy
     Advanced Energy develops innovative power and control technologies that
 drive high-growth, plasma thin-film and nanotech manufacturing processes
 worldwide, including semiconductors, flat panel displays, data storage
 products, solar cells, architectural glass and other advanced product
 applications.
     AE's product portfolio includes precise, flexible power systems;
 reliable gas and liquid flow-management systems; accurate thermal
 instruments; and global support services. Leveraging this focused product
 portfolio and technology leadership, AE creates solutions that maximize
 process impact, improve productivity and lower cost of ownership for its
 customers, including original equipment manufacturers (OEMs) and end-users
 around the world.
     AE operates in regional centers in North America, Asia, and Europe and
 offers global sales and support through direct offices, representatives,
 and distributors. Founded in 1981, AE is a publicly held company traded on
 Nasdaq National Market under the symbol AEIS. For more information, go to
 www.advanced-energy.com
     Advanced Energy(R) and AE(R) are trademarks of Advanced Energy
 Industries, Inc.
 
 

SOURCE Advanced Energy Industries, Inc.

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