FORT COLLINS, Colo., May 16 /PRNewswire-FirstCall/ -- Advanced Energy
Industries, Inc. (Nasdaq: AEIS) today announced it has secured a design win
for its Sekidenko temperature and emissivity instrumentation from a leading
provider of chemical vapor deposition (CVD) equipment for semiconductor
manufacturing. The Sekidenko instruments provide advanced, multi-channel
temperature measurement for use in sub-90-nm low-k dielectric film and
high-stress silicon nitride cures. The innovative, integrated solution
benefits the customer by providing enhanced wafer-to-wafer uniformity and
improved overall process yield. This design win highlights AE's strong
ability to develop application-specific solutions that address important
technology issues affecting the success of its customers.
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AE's thermal instrumentation technology offers in-situ, non-contact
optical fiber thermometer (OFT) capability with real-time emissivity
compensation. For sub-90-nm applications, AE's Sekidenko instrumentation
delivers the high stability, exceptional repeatability and precision
required for advanced, volume-production environments.
"This design win demonstrates AE's talent for addressing our customers'
process concerns with innovative technology," noted Dr. Hans Betz, AE
president and CEO. "Applying our broad application expertise in thermal
instrumentation, we worked in partnership with this customer to build an
application-specific temperature and emissivity solution that optimizes
their process. As we grow our position in this core semiconductor market,
we continue to proactively listen to our customers to help them gain
competitive advantages with our solutions."
Sekidenko Optical Fiber Thermometers (OFTs)
AE's Sekidenko optical fiber thermometers (OFT) with real-time
emissivity compensation are in-situ, non-contact instruments that enable
customers to improve within-wafer and wafer-to-wafer temperature
uniformity. Further, AE's custom, thermal-instrumentation application
consulting includes heat-transfer design analysis, extensive material
evaluation and custom interface solutions.
About Advanced Energy
Advanced Energy develops innovative power and control technologies that
drive high-growth, plasma thin-film and nanotech manufacturing processes
worldwide, including semiconductors, flat panel displays, data storage
products, solar cells, architectural glass and other advanced product
AE's product portfolio includes precise, flexible power systems;
reliable gas and liquid flow-management systems; accurate thermal
instruments; and global support services. Leveraging this focused product
portfolio and technology leadership, AE creates solutions that maximize
process impact, improve productivity and lower cost of ownership for its
customers, including original equipment manufacturers (OEMs) and end-users
around the world.
AE operates in regional centers in North America, Asia, and Europe and
offers global sales and support through direct offices, representatives,
and distributors. Founded in 1981, AE is a publicly held company traded on
Nasdaq National Market under the symbol AEIS. For more information, go to
Advanced Energy(R) and AE(R) are trademarks of Advanced Energy
SOURCE Advanced Energy Industries, Inc.