Advanced Energy(R) Unveils New Line of Sekidenko Multi-Channel Optical Fiber Thermometers and Emissometers New Product Family Offers Shorter Processing Times and Increased

Productivity for Multiple Semiconductor Processes



    FORT COLLINS, Colo., June 27 /PRNewswire-FirstCall/ -- Advanced Energy
 Industries, Inc. (Nasdaq:   AEIS) today announced its new line of Sekidenko
 optical fiber thermometers (OFTs) and emissometers comprised of the
 OR4000T, OR4000E and OR400T family of products. AE(R)'s OFTs are ideally
 suited for tightly controlled, temperature- and emissivity-dependent
 applications such as laser annealing, RTP, MO-CVD, PE-CVD, PVD, metal etch
 and other applications. The new Sekidenko product family offers original
 equipment manufacturers (OEMs) the exceptional stability and product
 flexibility needed to meet the increasingly stringent demands of today's
 leading semiconductor applications. AE will introduce the new OR4000
 product family during SEMICON(R) West 2006, to be held July 11-13 at San
 Francisco's Moscone Convention Center.
     (Logo: http://www.newscom.com/cgi-bin/prnh/20030825/AEISLOGO )
     AE's advanced Sekidenko thermal instrumentation products provide OEMs
 with superior, non-contact temperature and emissivity capabilities for
 semiconductor processes where uniform substrate temperatures enable
 critical process results and enhanced throughput and yield. Modular in
 design, AE's OR4000T and OR4000E can be rapidly tailored to meet the unique
 requirements of each process application.
     Chuck Gooding, vice president of the Sekidenko product line, noted,
 "AE's Sekidenko instrumentation delivers the high stability, exceptional
 repeatability and precision required for advanced, volume-production
 environments. Based on the successful OR2000 family, this new line of OFTs
 continues AE's best-of-breed tradition. Our dedication to technology
 innovation exemplifies our commitment to increasing our customers'
 competitive advantage."
     OR4000T Multi-Channel OFT
     The OR4000T provides multi-channel temperature measurement and enables
 uniform, integrated measurements within multiple chambers. Designed for
 RTP, HDP-CVD, epi, ALD and HDD applications, the OR4000T supports read
 rates up to 2 KHz for the most demanding semiconductor applications.
     OR4000E Real-Time Emissivity Compensated OFT
     The OR4000E delivers the same high speed performance as the OR4000T
 with the added benefit of real-time emissivity compensated temperature
 measurement and the capability to support growth rate monitoring typically
 required for MO-CVD applications. Designed for RTP, HDP-CVD, MO-CVD and UV
 cure, the OR4000E provides accurate temperature and emissivity measurements
 across a wide variety of processes.
     OR400T Precision, Single-Channel OFT
     The OR400T is a precision instrument that enables cost-effective
 temperature measurement in a compact form factor. The single-channel
 product provides a cost competitive alternative to thermocouples with the
 added benefit of non-contact, in-situ temperature measurement and immunity
 from RF noise. The OR400T is ideally suited for several high-volume
 semiconductor applications including PE-CVD, LP-CVD, PVD and metal etch.
     To learn more about AE's new line of OFTs and emissometers during
 SEMICON West, visit the company in Booth #2202 in the South Hall at Moscone
 Convention Center in San Francisco. Editors interested in meeting with AE
 during the show may contact Angie Kellen by phone: 650.968.8900 x120, or
 email: akellen@mcapr.com.
     About Advanced Energy
     Advanced Energy(R) develops innovative power and control technologies
 that drive high-growth, plasma thin-film manufacturing processes worldwide,
 including semiconductors, flat panel displays, data storage products, solar
 cells, architectural glass and other advanced product applications.
     AE(R)'s product portfolio includes precise, flexible power systems;
 reliable gas and liquid flow-management systems; accurate thermal
 instruments; and global support services. Leveraging this focused product
 portfolio and technology leadership, AE creates solutions aimed at
 maximizing process impact, improving productivity and lowering cost of
 ownership for its customers, including original equipment manufacturers
 (OEMs) and end-users around the world.
     AE operates in regional centers in North America, Asia and Europe and
 offers global sales and support through direct offices, representatives and
 distributors. Founded in 1981, AE is a publicly held company traded on
 Nasdaq National Market under the symbol AEIS. For more information, go to
 www.advanced-energy.com
     Advanced Energy(R) and AE(R) are trademarks of Advanced Energy
 Industries, Inc.
     SEMICON(R) is a trademark of Semiconductor Equipment and Materials
 International (SEMI).
 
 

SOURCE Advanced Energy Industries, Inc.

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