10 kHz Source Enables High Volume Manufacturing (HVM) Simulation
EUV sources for HVM are expected to operate at pulse repetition rates of 10 kHz or higher. To simulate the effects of operating at such pulse rates on the optics lifetime, for example, high repetition rate metrology sources are needed. Energetiq addresses this need with the new EQ-10HR EUV Source that operates at a 10 kHz pulse rate. The EQ-10HR is based upon Energetiq's innovative EQ-10 EUV Source design, which has become an industry standard EUV metrology source since its introduction in 2005. The original EQ-10 was designed to operate at a pulse frequency of 1 to 2 kHz--a repetition rate below HVM requirements--and its fundamental principle of operation, the Electrodeless Z-Pinch(TM), has been employed in the EQ-10HR high pulse rate source. Energetiq's patented Electrodeless Z-Pinch technology inductively couples the current into the discharge plasma, making the plasma extremely stable and controllable. The plasma is confined away from source components, reducing debris and allowing very long operating life and very low cost of ownership.
"We are very excited to bring about a reliable, cost-effective solution for producing EUV light in HVM testing," said
The EQ-10HR integrates easily into process tools and will run continuously at pulse repetition rates of 10 kHz for many billions of pulses.
Note to editors: Download photo of EQ-10HR at http://www.energetiq.com/html/photos.html
Energetiq Technology, Inc. is a developer and manufacturer of advanced short wavelength light products that enable nano-scale structures and products. The Energetiq team combines its deep understanding of the high power plasma physics needed for short wavelength light generation with its long experience in building rugged, industrial and scientific products. The result is that users can expect the highest levels of performance combined with the highest reliability.
SOURCE Energetiq Technology, Inc.