FEI Introduces Nova(TM) NanoSEM New System is the World's First SEM for Ultra-High Resolution Characterization

of Non-Conductive or Contaminating Samples



    HILLSBORO, Ore., March 1 /PRNewswire-FirstCall/ -- FEI Company
 (Nasdaq:   FEIC) today released the newest member of its Nova(TM) family of SEM
 and DualBeam(TM) systems, the Nova NanoSEM.  It is the world's first
 low-vacuum, field emission scanning electron microscope (FEG-SEM) solution for
 ultra-high resolution characterization of charging and/or contaminating
 samples such as organic materials, substrates, porous materials, plastics and
 polymers. This newest system joins FEI's growing line of market-leading tools
 that are enabling nanoscale research, development and manufacturing in a
 diverse range of markets and applications.
     The Nova NanoSEM brings new capabilities to researchers and developers
 working with non-conductive and contaminating nanoscale materials. FEI's Helix
 detector technology, introduced with the Nova NanoSEM, combines magnetic
 immersion lens and low-vacuum SEM technologies for the first time in the
 history of field emission scanning electron microscopy. The combined effect
 delivers ultra-high resolution, low-vacuum characterization capabilities in an
 environment that suppresses charge build-up on non-conductive materials. The
 unique technology incorporated in the Nova NanoSEM also suppresses
 electron-beam induced contamination resulting from previous sample processing
 steps.
     "The Nova NanoSEM, with its proprietary optics and detection systems, was
 developed to meet the growing needs of customers who are faced with evolving
 applications and expanding challenges," commented Tony Edwards, FEI's business
 line manager for SEM and small DualBeam products. "FEI led the market with its
 ESEM technology for charging and non-coated samples. Now it extends its
 leadership by combining the most advanced low-vacuum and ultra-high resolution
 design features for these challenging yet critical sample types."
     The Nova NanoSEM also features in-lens as well as low-vacuum secondary and
 back scatter electron (BSE) imaging modes, and FEI's proprietary beam gas
 chemistries for e-beam writing of nanostructures, making it the ideal SEM for
 research and advanced study of nano-structures and nano-materials.
     The growing complexity and shrinking dimensions of materials, devices and
 biological samples, have resulted in increased demand for nanoscale
 characterization tools across all markets served by FEI. In 2004, FEI was the
 first electron optics manufacturer to deliver sub-Angstrom or atomic scale
 resolution on a commercially available transmission electron microscope. With
 the Nova NanoSEM and its other tools for enabling nanotechnology, FEI
 continues to lead advances in ultra-high resolution characterization and
 analysis of a wide variety of samples at nanoscale dimensions.
 
     About FEI
     FEI's Tools for Nanotech(TM), featuring focused ion- and electron-beam
 technologies, deliver 3D characterization, analysis and modification
 capabilities with resolution down to the sub-Angstrom level. With R&D centers
 in North America and Europe and sales and service operations in more than
 40 countries around the world, FEI is bringing the nanoscale within the grasp
 of leading researchers and manufacturers and helping to turn some of the
 biggest ideas of this century into reality. More information can be found on
 the FEI website at: http://www.feicompany.com.
 
 

SOURCE FEI Company

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