SAN JOSE, Calif., Sept. 13 /PRNewswire-FirstCall/ -- KLA-Tencor
(Nasdaq: KLAC) today unveiled its Candela Optical Surface Analyzer 6300
series tool-a system that delivers best-in-class metrology and inspection
capabilities for data storage substrates and finished media. As data
storage manufacturers strive to enhance device storage capacities by
reducing head fly-heights even further, controlling disk surface roughness
is becoming increasingly important. The 6300 series leverages the
industry's widest spatial bandwidth coverage (from 0.22 microns to 2,000
microns) and a noise floor below 0.5 angstroms to satisfy emerging
requirements for comprehensive roughness and micro-waviness measurements.
The 6300 series also harnesses patented multi-channel optics, combined
with unique laser stability management technology, to deliver powerful
measurement capabilities for edge roll-off and texture/polish uniformity,
as well as scratch and particle inspection. As a result of its
comprehensive capabilities, manufacturers can now employ a single tool to
measure the quality of their substrates. This makes the 6300 series the
ideal solution for next-generation process control of disk topography on
conventional metal or glass substrates and finished media.
"The key trends in the data storage industry -- the moves toward
smaller form factors, glass substrates, higher areal densities and improved
reliability -- are all driving the need for better control of the head-disk
interface, requiring improvements in inspection and metrology of disks,"
said Mark Geenen, president of market research firm TrendFOCUS. "It is
becoming especially critical to acquire repeatable measurements of
extremely low roughness levels, to quantify edge roll-off and also detect
sub-micron particles and very shallow surface scratches. Concurrently,
testing time and total product cost are under sustained pressure. An
approach like this may not only reduce equipment expenditures, but also may
provide a new path to optimizing quality and throughput times."
"The 6300 series is a breakthrough tool that enables our data storage
customers to reduce their dependence on multiple toolsets by providing a
single system for topography metrology and defect inspection," stated Jeff
Donnelly, vice president and general manager of KLA-Tencor's Growth and
Emerging Markets (GEM) Division. "The 6300 is built on a production-proven
platform and directly contributes to enhancing our customers' time to
market and ultimate profitability. The newest offering in our comprehensive
product lineup, the 6300 offers significant advantages over alternative
point solutions -- especially when it comes to its unrivalled spatial
wavelength capability combined with fast, full-surface coverage," he added.
The 6300's leading-edge optical scanning technology enables full
surface disk topography metrology in both radial and circumferential
directions, and allows manufacturers to use a single tool to measure the
entire spatial spectrum. Increased laser power, a lower noise floor and new
optics design eliminate the need for sputtering glass substrates in order
to detect defects and also allows for identification of roughness
variations of less than 0.1 angstroms. Compared with other scatterometers
or laser doppler vibrometry systems, the 6300 delivers radial and
circumferential data and full surface topography information on
ultra-smooth substrate and media. The 6300 also provides full-disk,
non-contact coverage at a much lower cost of measurement and faster speed
than stylus profilers or atomic force microscopy (AFM) technologies.
Furthermore, the 6300 series offers excellent correlation to AFM --
simultaneously reducing AFM dependence and making it a more efficient
The 6300 series has undergone extensive beta evaluations and KLA-Tencor
is currently accepting product orders. Shipping will begin in October 2006.
KLA-Tencor will showcase the 6300 and other yield management solutions
for the data storage industry at the DISKCON USA 2006 Trade Show and
Conference, September 13-14, at booth #115 at the Santa Clara Convention
Center, Santa Clara, Calif.
About KLA-Tencor: KLA-Tencor is the world leader in yield management
and process control solutions for semiconductor manufacturing and related
industries. Headquartered in San Jose, Calif., the company has sales and
service offices around the world. An S&P 500 company, KLA-Tencor is traded
on the Nasdaq National Market under the symbol KLAC. Additional information
about the company is available on the Internet at http://www.kla-tencor.com