KLA-Tencor's 2800 Broadband DUV Brightfield System Accelerates Defect Learning by Six Months at Crolles2 Alliance
SAN JOSE, Calif., June 13 /PRNewswire-FirstCall/ -- In recognition of its unique inspection ability, KLA-Tencor (Nasdaq: KLAC) today announced that the Crolles2 Alliance -- a 300-mm manufacturing and R&D collaboration between Freescale Semiconductor, STMicroelectronics and Philips Semiconductors -- has adopted the new 2800 broadband DUV brightfield system. Using the 2800 in a collaboration for its 65-nm development and 90-nm production, Crolles2 has been able to identify critical yield-impacting defects that it was unable to detect using previous-generation inspection tools. "We are very pleased with the success of this collaboration between the Crolles2 Alliance and KLA-Tencor. By engaging early in the development of this tool we have accelerated our defect learning by almost six months and continue to uncover unique use cases each month on both our 90-nm and 65-nm technologies," said Joel Hartmann, Fab Director at the Crolles2 Alliance. "As a result of this successful partnership with KLA-Tencor, and to meet our factory ramp, we decided to install additional 2800 inspection capacity." As the only broadband DUV/UV/visible patterned wafer inspection tool available on the market, the 2800 enables a very wide capture of all defect types on all layers. Continuing from the success of the 23xx UV/visible brightfield platform, the 2800 has been seamlessly integrated into both pilot lines and production fabs. Since its release in July 2005, the 2800 has been installed in leading logic, memory and foundry fabs worldwide, including multiple installations in several fabs. About KLA-Tencor: KLA-Tencor is the world leader in yield management and process control solutions for semiconductor manufacturing and related industries. Headquartered in San Jose, Calif., the company has sales and service offices around the world. An S&P 500 company, KLA-Tencor is traded on the Nasdaq National Market under the symbol KLAC. Additional information about the company is available on the Internet at: http://www.kla-tencor.com
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