KLA-Tencor's 2800 Broadband DUV Brightfield System Accelerates Defect Learning by Six Months at Crolles2 Alliance

Jun 13, 2006, 01:00 ET from KLA-Tencor

    SAN JOSE, Calif., June 13 /PRNewswire-FirstCall/ -- In recognition of
 its unique inspection ability, KLA-Tencor (Nasdaq:   KLAC) today announced
 that the Crolles2 Alliance -- a 300-mm manufacturing and R&D collaboration
 between Freescale Semiconductor, STMicroelectronics and Philips
 Semiconductors -- has adopted the new 2800 broadband DUV brightfield
 system. Using the 2800 in a collaboration for its 65-nm development and
 90-nm production, Crolles2 has been able to identify critical
 yield-impacting defects that it was unable to detect using
 previous-generation inspection tools.
     "We are very pleased with the success of this collaboration between the
 Crolles2 Alliance and KLA-Tencor. By engaging early in the development of
 this tool we have accelerated our defect learning by almost six months and
 continue to uncover unique use cases each month on both our 90-nm and 65-nm
 technologies," said Joel Hartmann, Fab Director at the Crolles2 Alliance.
 "As a result of this successful partnership with KLA-Tencor, and to meet
 our factory ramp, we decided to install additional 2800 inspection
     As the only broadband DUV/UV/visible patterned wafer inspection tool
 available on the market, the 2800 enables a very wide capture of all defect
 types on all layers. Continuing from the success of the 23xx UV/visible
 brightfield platform, the 2800 has been seamlessly integrated into both
 pilot lines and production fabs. Since its release in July 2005, the 2800
 has been installed in leading logic, memory and foundry fabs worldwide,
 including multiple installations in several fabs.
     About KLA-Tencor: KLA-Tencor is the world leader in yield management
 and process control solutions for semiconductor manufacturing and related
 industries. Headquartered in San Jose, Calif., the company has sales and
 service offices around the world. An S&P 500 company, KLA-Tencor is traded
 on the Nasdaq National Market under the symbol KLAC. Additional information
 about the company is available on the Internet at: