FREMONT, Calif., Nov. 8 /PRNewswire-FirstCall/ -- Mattson Technology, Inc.
(Nasdaq: MTSN), a leading supplier of advanced process equipment used to
manufacture semiconductors, today announced that it has received an order for
its flash-assisted rapid thermal processing (fRTP) system from the Fraunhofer-
Center Nanoelectronic Technologies (CNT). This new millisecond flash annealing
system is scheduled to ship in December to the CNT facility in Dresden,
Germany, where it will be used for process and performance characterization of
critical flash RTP applications.
Nanotechnology is the design and production of chips and other electronic
devices with features approaching the size of molecules or atoms.
Nanoelectronics is the next step after microelectronics and works with
circuits and devices that are smaller than one hundred nanometers, or one ten-
millionths of a meter. Beyond being used in computers and communication
devices, nanotechnology could be used to build devices, change the properties
of materials and make advances in biotechnology.
"The CNT will focus on the industry's technological challenges in its
transition to nanoelectronics, enabling chipmakers to overcome significant
processing obstacles so they can make further device shrinks," said the
director Dr. Peter Kuecher. "We are pleased to cooperate with leading
semiconductor equipment manufacturers such as Mattson to develop innovative
semiconductor process solutions quickly and efficiently to transfer them
directly into the manufacturing environment."
"Chipmakers today are facing the challenge to shrink silicon geometries
below 65 nanometers and quickly implement process technology innovations into
manufacturing lines," said Stephen T. Lanza, Mattson Technology's Global
Business Operations vice president & general manager, Europe and North
America. "Our fRTP system has demonstrated the advanced capabilities to
address critical sub-65 nanometer applications, and we look forward to working
with CNT to develop leading-edge processes for the manufacturing of high-
performance transistors for our global customers."
The emerging millisecond anneal market is anticipated to grow at a
compound annual growth rate of 57.6 percent over the next five years.
Mattson's new fRTP system features a patented arc lamp and flash technology
that improves thermal control for millisecond flash-assisted RTP annealing and
is expected to meet advanced ultra-shallow junction anneal, improved gate
stacks and other enabling process requirements through the 22 nm regime.
The Fraunhofer-Center Nanoelectronic Technologies (CNT) in Dresden is a
private-public partnership of the Fraunhofer-Gesellschaft, Infineon
Technologies AG and Advanced Micro Devices (AMD). The CNT's objective is to
become a key semiconductor and nanoelectronics research center to accelerate
the introduction of new semiconductor technologies from R&D to production.
Information on the CNT is available at
About Mattson Technology, Inc.
Mattson Technology, Inc. is the leading supplier of dry strip equipment
and the second largest supplier of rapid thermal processing equipment in the
global semiconductor industry. The company's strip and RTP equipment utilize
innovative technology to deliver advanced processing performance and
productivity gains to semiconductor manufacturers worldwide for the
fabrication of current- and next-generation devices. For more information,
please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont,
Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911.
Mattson Technology Contact
SOURCE Mattson Technology, Inc.