New Fraunhofer-Center Nanoelectronic Technologies Chooses Mattson's New Flash- Assisted RTP System

Nov 08, 2005, 00:00 ET from Mattson Technology, Inc.

    FREMONT, Calif., Nov. 8 /PRNewswire-FirstCall/ -- Mattson Technology, Inc.
 (Nasdaq:   MTSN), a leading supplier of advanced process equipment used to
 manufacture semiconductors, today announced that it has received an order for
 its flash-assisted rapid thermal processing (fRTP) system from the Fraunhofer-
 Center Nanoelectronic Technologies (CNT). This new millisecond flash annealing
 system is scheduled to ship in December to the CNT facility in Dresden,
 Germany, where it will be used for process and performance characterization of
 critical flash RTP applications.
     Nanotechnology is the design and production of chips and other electronic
 devices with features approaching the size of molecules or atoms.
 Nanoelectronics is the next step after microelectronics and works with
 circuits and devices that are smaller than one hundred nanometers, or one ten-
 millionths of a meter. Beyond being used in computers and communication
 devices, nanotechnology could be used to build devices, change the properties
 of materials and make advances in biotechnology.
     "The CNT will focus on the industry's technological challenges in its
 transition to nanoelectronics, enabling chipmakers to overcome significant
 processing obstacles so they can make further device shrinks," said the
 director Dr. Peter Kuecher. "We are pleased to cooperate with leading
 semiconductor equipment manufacturers such as Mattson to develop innovative
 semiconductor process solutions quickly and efficiently to transfer them
 directly into the manufacturing environment."
     "Chipmakers today are facing the challenge to shrink silicon geometries
 below 65 nanometers and quickly implement process technology innovations into
 manufacturing lines," said Stephen T. Lanza, Mattson Technology's Global
 Business Operations vice president & general manager, Europe and North
 America. "Our fRTP system has demonstrated the advanced capabilities to
 address critical sub-65 nanometer applications, and we look forward to working
 with CNT to develop leading-edge processes for the manufacturing of high-
 performance transistors for our global customers."
     The emerging millisecond anneal market is anticipated to grow at a
 compound annual growth rate of 57.6 percent over the next five years.
 Mattson's new fRTP system features a patented arc lamp and flash technology
 that improves thermal control for millisecond flash-assisted RTP annealing and
 is expected to meet advanced ultra-shallow junction anneal, improved gate
 stacks and other enabling process requirements through the 22 nm regime.
     About CNT
     The Fraunhofer-Center Nanoelectronic Technologies (CNT) in Dresden is a
 private-public partnership of the Fraunhofer-Gesellschaft, Infineon
 Technologies AG and Advanced Micro Devices (AMD). The CNT's objective is to
 become a key semiconductor and nanoelectronics research center to accelerate
 the introduction of new semiconductor technologies from R&D to production.
 Information on the CNT is available at
     About Mattson Technology, Inc.
     Mattson Technology, Inc. is the leading supplier of dry strip equipment
 and the second largest supplier of rapid thermal processing equipment in the
 global semiconductor industry. The company's strip and RTP equipment utilize
 innovative technology to deliver advanced processing performance and
 productivity gains to semiconductor manufacturers worldwide for the
 fabrication of current- and next-generation devices. For more information,
 please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont,
 Calif. 94538.  Telephone: (800) MATTSON/(510) 657-5900.  Fax: (510) 492-5911.
      Mattson Technology Contact
      Lauren Vu
      tel  +1-510-492-6518
      fax  +1-510-492-2800

SOURCE Mattson Technology, Inc.