Nova Awarded SI Editors' Choice 2004 Best Product Award

Nova's integrated metrology systems for copper CMP are one out of 15 systems

awarded by one of the leading magazines in the industry

Apr 22, 2004, 01:00 ET from Nova Measuring Instruments Ltd.

    MUNICH, Germany, April 22 /PRNewswire-FirstCall/ -- Semicon Europa -- Nova
 Measuring Instruments Ltd. (Nasdaq:   NVMI) has received the prestigious
 Editors' Choice Best Product Award, presented annually by the Semiconductor
 International magazine, for its NovaScan 2020Cu and 3030Cu Integrated
 Metrology systems for Copper CMP process monitoring. Semiconductor
 International announced 15 commercially proven industry products for
 excellence in semiconductor manufacturing. The 2004 entrants exemplified
 state-of-the-art equipment and materials, installed and used in numerous fabs
 around the world. The awards were handed out to the winners during a festive
 event ceremony at the Semicon Europa show.
     The NovaScan 2020Cu and 3030Cu non-contact, non-intrusive optical
 measurement systems using spectrophotometric and imaging technology provide
 integrated non-contact and fast erosion measurements, low-K cap layer removal
 and copper/barrier residues detection. These combined optical capabilities
 enable improved control of the polish process and elimination of
 time-consuming off-line measurements. The systems enable precise control of
 over-polishing and provide quantitative data on the electrical performance of
 the copper lines for the tightest possible wafer-to-wafer control. 100%
 sampling of the wafers for effective CLC that allow prevention of scrap and/or
 excursions, makes NovaScan 2020Cu and 3030Cu an efficient tool for the control
 of consumables. The NovaScan Copper systems are available on most polishers,
 both for 200mm and 300mm copper CMP processes. The patented technology for
 measurements on arrays is a key to real production implementation.
     Dr. Giora Dishon, President and CEO, said: "We are very excited that our
 copper systems received this important award. Our customers continually report
 on exceptional performances of the process equipment with Nova's integrated
 metrology systems for copper, reporting on cycle time reduction between 19 to
 77 min. per lot, improvements in equipment and fab efficiencies, and overall
 increased productivity of the dual damascene copper CMP process. The NovaScan
 Copper systems have a tremendous potential for 90nm volume manufacturing and
 are now being implemented at 7 different sites for high volume manufacturing
 at major semiconductor manufacturers all over the world. The move to 90nm
 production on 300mm wafers provides a significant opportunity for us in this
 industry-wide upturn."
     'The 2004 Editors' Choice Best Products program is different from
 traditional award competitions in that products are nominated by users, not by
 the companies that make or sell the product," noted Semiconductor
 International Editor-in-Chief Peter Singer. "After products were nominated, we
 gathered additional information inputs from other users and from the product
 supplier. We ultimately based our decision on the superiority of the product
 in a semiconductor manufacturing environment."
     Nova Measuring Instruments Ltd. develops, designs and produces integrated
 process control systems in the semiconductor manufacturing industry. Nova
 provides a broad range of integrated process control solutions that link
 different semiconductor processes and process equipment. The Company's website
     Semiconductor International, published by Reed Business Information and a
 part of Reed Elsevier's global array of information products, is the leading
 technical publication reaching and covering the global semiconductor
 manufacturing industry. SI boasts the industry's most experienced full-time
 technical editorial team, and has the largest circulation to semiconductor
 manufacturers of any industry publication. Additional information about SI and
 its many products and activities are available at
     For more information about the Editors' Choice Product Awards program, go
      Company Contact:
      Chai Toren, CFO and Vice President
      Nova Measuring Instruments Ltd.
      Tel: 972-8-938-7505
      Investor relations Contacts:
      Ehud Helft/Kenny Green
      Gal IR International
      Tel: +1-866-704-6710

SOURCE Nova Measuring Instruments Ltd.