KLA-Tencor and Therma-Wave Settle Lawsuits

Apr 10, 2001, 01:00 ET from KLA-Tencor Corp.

    SAN JOSE, Calif., Apr. 10 /PRNewswire/ -- KLA-Tencor Corp. (Nasdaq: KLAC)
 and Therma-Wave, Inc. (Nasdaq: TWAV) today announced they have settled all
 pending litigation between them.  As part of the settlement, KLA-Tencor has
 granted Therma-Wave a license on its U.S. Patent No. 4,899,055 entitled "Thin
 Film Thickness Measuring Method."  In exchange, Therma-Wave has granted
 KLA-Tencor a license on its U.S. Patent No. 5,596,406, entitled "Sample
 Characteristic Analysis Utilizing Multi Wavelength And Multi Angle
 Polarization And Magnitude Change Detection;" and U.S. Patent No. 5,798,837
 and 5,900,939, both entitled "Thin Film Optical Measurement System and Method
 With Calibrating Ellipsometer."  In addition, Therma-Wave agreed to modify its
 products to avoid using certain technology patented by KLA-Tencor and both
 parties agreed to a moratorium on any patent litigation for an undisclosed
 period of time.  The settlement also resulted in a payment of an undisclosed
 sum to KLA-Tencor.
 
     About KLA-Tencor:
     KLA-Tencor is the world leader in yield management and process control
 solutions for semiconductor manufacturing and related industries.
 Headquartered in San Jose, Calif., the company has sales and service offices
 around the world.  An S&P 500 company, KLA-Tencor is traded on the Nasdaq
 National Market under the symbol KLAC.  Additional information about the
 company is available on the Internet at http://www.kla-tencor.com .
 
     About Therma-Wave:
     Since 1982, Therma-Wave, Inc. has been revolutionizing process control
 metrology systems through innovative, proprietary products and technologies.
 The company is a worldwide leader in the development, manufacture, marketing
 and service of process control metrology systems used in the manufacture of
 semiconductors.  Therma-Wave currently offers leading-edge products to the
 semiconductor industry for the measurement of transparent, semi-transparent
 and opaque thin films, for the monitoring of ion implantation, and for the
 integration of metrology into semiconductor processing systems.  For further
 information about Therma-Wave, Inc., access our web site at
 www.thermawave.com.
 
 

SOURCE KLA-Tencor Corp.
    SAN JOSE, Calif., Apr. 10 /PRNewswire/ -- KLA-Tencor Corp. (Nasdaq: KLAC)
 and Therma-Wave, Inc. (Nasdaq: TWAV) today announced they have settled all
 pending litigation between them.  As part of the settlement, KLA-Tencor has
 granted Therma-Wave a license on its U.S. Patent No. 4,899,055 entitled "Thin
 Film Thickness Measuring Method."  In exchange, Therma-Wave has granted
 KLA-Tencor a license on its U.S. Patent No. 5,596,406, entitled "Sample
 Characteristic Analysis Utilizing Multi Wavelength And Multi Angle
 Polarization And Magnitude Change Detection;" and U.S. Patent No. 5,798,837
 and 5,900,939, both entitled "Thin Film Optical Measurement System and Method
 With Calibrating Ellipsometer."  In addition, Therma-Wave agreed to modify its
 products to avoid using certain technology patented by KLA-Tencor and both
 parties agreed to a moratorium on any patent litigation for an undisclosed
 period of time.  The settlement also resulted in a payment of an undisclosed
 sum to KLA-Tencor.
 
     About KLA-Tencor:
     KLA-Tencor is the world leader in yield management and process control
 solutions for semiconductor manufacturing and related industries.
 Headquartered in San Jose, Calif., the company has sales and service offices
 around the world.  An S&P 500 company, KLA-Tencor is traded on the Nasdaq
 National Market under the symbol KLAC.  Additional information about the
 company is available on the Internet at http://www.kla-tencor.com .
 
     About Therma-Wave:
     Since 1982, Therma-Wave, Inc. has been revolutionizing process control
 metrology systems through innovative, proprietary products and technologies.
 The company is a worldwide leader in the development, manufacture, marketing
 and service of process control metrology systems used in the manufacture of
 semiconductors.  Therma-Wave currently offers leading-edge products to the
 semiconductor industry for the measurement of transparent, semi-transparent
 and opaque thin films, for the monitoring of ion implantation, and for the
 integration of metrology into semiconductor processing systems.  For further
 information about Therma-Wave, Inc., access our web site at
 www.thermawave.com.
 
 SOURCE  KLA-Tencor Corp.