Matrix Announces 300 mm Order

Apr 18, 2001, 01:00 ET from Matrix Integrated Systems, Inc.

    RICHMOND, Calif., April 18 /PRNewswire/ -- Matrix Integrated Systems,
 Inc., a global supplier of advanced process equipment used to manufacture
 semiconductors, announced receipt of an order for its Panther 300 single
 chamber photoresist strip system for 300 mm wafers from a global,
 North American based, multi-billion dollar customer.
     Commenting on the announcement, Jim Marshall, Chairman, President and CEO
 of Matrix, stated:  "We are extremely pleased to have received this order as
 confirmation of our strategy to provide a single chamber 200 mm / 300 mm
 "Bridge Tool" with the best "value proposition" available in the market today.
 The Panther 300 delivers throughputs in excess of 100 wafers per hour in a
 footprint of 16 square feet at a base price of under $550,000, while providing
 industry leading process results.  The Panther introduction and market
 acceptance augments our previous introduction and qualification of our Jaguar
 300 dual chamber high throughput system with SEMATECH I300I over the past two
 years.  A Jaguar 300 dual chamber system is currently installed at SEMATECH in
 Austin, Texas as part of a joint development program."
     Gerald Cox, COO of Matrix, stated:  "This order is a clear testament to
 our new product strategy of ultra compact and high throughput etch and strip
 systems that yield the industry's lowest cost of ownership. Our building block
 approach launched three years ago offers exceptional configuration flexibility
 and rapid time-to-market with minimum development cost. Leadership in
 microwave plasma source and process technology has resulted in a growing
 portfolio of intellectual property and numerous recent wins over established
 competitors."
     While declining to identify the customer in question, Mr. Marshall noted
 that the Panther 300 will be installed in the customer's advanced process
 integration facility where it will be used for photoresist removal and
 cleaning steps associated with low-K dielectric and copper interconnect
 process development for advanced, sub-0.25 micron integrated circuit devices.
 
     About Matrix:
     Matrix Integrated Systems, Inc., headquartered in Richmond, California,
 with offices in Belgium and Japan, is a privately held global semiconductor
 equipment company that designs, manufactures, sells and services plasma based,
 photoresist strip and cleaning systems as well as isotropic etch systems used
 in the fabrication of integrated circuits.  Matrix competes with predominantly
 larger, public companies such as Mattson Technology (MTSN), GaSonics (GSNX)
 recently acquired by Novellus (NVLS) and Axcelis Technologies (ACLS) a recent
 IPO spin-out from Eaton Corporation (ETN).  Matrix offers a comprehensive line
 of equipment to address all wafer sizes from 50 mm through 300 mm.  The
 Company's line of "Cat" systems introduced from 1998 through 2000 include the
 Cheetah 200, a dual chamber high throughput system for 200 mm and smaller
 wafers, the Jaguar 300, a dual chamber high throughput system for 300 mm
 wafers, the BobCat 200, a single chamber system for 200 mm and smaller wafers
 and the Panther 300, a single chamber "Bridge Tool" for 300 mm and 200 mm
 wafer sizes.  All four "Cat" systems offer the industry's lowest Cost of
 Ownership through a combination of high throughput, small footprint and low
 system cost.
 
 

SOURCE Matrix Integrated Systems, Inc.
    RICHMOND, Calif., April 18 /PRNewswire/ -- Matrix Integrated Systems,
 Inc., a global supplier of advanced process equipment used to manufacture
 semiconductors, announced receipt of an order for its Panther 300 single
 chamber photoresist strip system for 300 mm wafers from a global,
 North American based, multi-billion dollar customer.
     Commenting on the announcement, Jim Marshall, Chairman, President and CEO
 of Matrix, stated:  "We are extremely pleased to have received this order as
 confirmation of our strategy to provide a single chamber 200 mm / 300 mm
 "Bridge Tool" with the best "value proposition" available in the market today.
 The Panther 300 delivers throughputs in excess of 100 wafers per hour in a
 footprint of 16 square feet at a base price of under $550,000, while providing
 industry leading process results.  The Panther introduction and market
 acceptance augments our previous introduction and qualification of our Jaguar
 300 dual chamber high throughput system with SEMATECH I300I over the past two
 years.  A Jaguar 300 dual chamber system is currently installed at SEMATECH in
 Austin, Texas as part of a joint development program."
     Gerald Cox, COO of Matrix, stated:  "This order is a clear testament to
 our new product strategy of ultra compact and high throughput etch and strip
 systems that yield the industry's lowest cost of ownership. Our building block
 approach launched three years ago offers exceptional configuration flexibility
 and rapid time-to-market with minimum development cost. Leadership in
 microwave plasma source and process technology has resulted in a growing
 portfolio of intellectual property and numerous recent wins over established
 competitors."
     While declining to identify the customer in question, Mr. Marshall noted
 that the Panther 300 will be installed in the customer's advanced process
 integration facility where it will be used for photoresist removal and
 cleaning steps associated with low-K dielectric and copper interconnect
 process development for advanced, sub-0.25 micron integrated circuit devices.
 
     About Matrix:
     Matrix Integrated Systems, Inc., headquartered in Richmond, California,
 with offices in Belgium and Japan, is a privately held global semiconductor
 equipment company that designs, manufactures, sells and services plasma based,
 photoresist strip and cleaning systems as well as isotropic etch systems used
 in the fabrication of integrated circuits.  Matrix competes with predominantly
 larger, public companies such as Mattson Technology (MTSN), GaSonics (GSNX)
 recently acquired by Novellus (NVLS) and Axcelis Technologies (ACLS) a recent
 IPO spin-out from Eaton Corporation (ETN).  Matrix offers a comprehensive line
 of equipment to address all wafer sizes from 50 mm through 300 mm.  The
 Company's line of "Cat" systems introduced from 1998 through 2000 include the
 Cheetah 200, a dual chamber high throughput system for 200 mm and smaller
 wafers, the Jaguar 300, a dual chamber high throughput system for 300 mm
 wafers, the BobCat 200, a single chamber system for 200 mm and smaller wafers
 and the Panther 300, a single chamber "Bridge Tool" for 300 mm and 200 mm
 wafer sizes.  All four "Cat" systems offer the industry's lowest Cost of
 Ownership through a combination of high throughput, small footprint and low
 system cost.
 
 SOURCE  Matrix Integrated Systems, Inc.