New MKS Micro-Baratron(R) Vista Pressure Transducer with Integrated Display for Surface Mount Gas Sticks

Delivery-gas pressure sensor for OEMs and gas box suppliers saves space

in 300 mm tool applications.



Apr 12, 2001, 01:00 ET from MKS Instruments, Inc.

    ANDOVER, Mass., April 12 /PRNewswire/ --MKS Instruments, Inc.,
 (Nasdaq:   MKSI) a supplier of components and subsystems for the semiconductor
 and thin-film industries, has introduced the new Micro-Baratron(R) Vista(TM)
 pressure transducer, a compact integrated gas pressure sensor for process tool
 manufacturers and gas delivery suppliers. The new transducer has a built in
 display and meets the requirements for space saving surface mount components
 that can be incorporated in 300mm tools. The 872B Micro-Baratron Vista can be
 easily installed on process tool gas delivery lines including gas box, gas
 panel, and gas delivery systems.
     Process tool designers now must provide systems for 300mm wafers that are
 no larger, and in some cases smaller, than the equivalent 200mm process tool.
 The figure of merit is the throughput divided by footprint area. For many
 tools that use process gases, a large amount of space is required for gas
 distribution systems, often aptly referred to as gas jungles. To save space,
 the industry is moving away from gas supply systems connected with in-line
 fittings to more compact "gas sticks" with surface mount fittings. Using this
 streamlined design, individual components can be closely spaced yet easily
 removed. Two standard seal types are emerging, termed "C" (SEMI Standard PR3)
 and "W" (SEMI Standard PR3.1).
     The Micro-Baratron Vista pressure transducer is less than five inches in
 overall height-the smallest integrated display sensor presently available-and
 is narrow enough to meet the 1-1/8" spacing requirement for easy downmount
 installation on a gas stick. The 15-pin D-type power connector is recessed on
 the side of the device and does not add additional height. Both C and W seal
 types are available. The onboard pressure display is adjustable in 90 degrees
 increments through 360 degrees for viewing from any desired angle. This unique
 capability makes it possible for maintenance technicians to monitor pressure
 directly, even if the central computer tool CRT display is not conveniently
 accessible. Full scale ranges are 1000 Torr, 100 PSIA and 250 PSIA, and the
 sensor has an accuracy of 1% of the pressure reading.
     For more information, call the MKS Applications Engineering Group at (800)
 227-8766/(978) 975-2350 or view our web site and on-line catalog
 (www.mksinst.com).
 
     MKS Instruments, Inc. is a global supplier of the broadest range of
 instruments, components and subsystems for vacuum and gas-based manufacturing
 processes. Pressure measurement and control products include Baratron(R)
 capacitance manometers and gas pressure transducers, as well as electronic
 pressure control subsystems. Materials Delivery & Analysis Products include
 Mass-Flo(R) controllers and subsystems for the delivery of vapors from liquids
 and solids, and Spectra(TM) quadrupole-based process monitors, residual gas
 analyzers, and optical sensors for the semiconductor and thin film industries.
 Vacuum products include HPS(R) vacuum components, valves, gauges, heaters and
 traps in addition to a complete line of process-specific Integrated Component
 Subsystems(TM) for manufacturing productivity enhancement. MKS D.I.P.(TM)
 Products group designs and manufactures digital control network products that
 are used in the semiconductor, commercial vehicle, oil and gas, and chemical
 processing industries. MKS ASTeX(R) Products manufactures reactive gas
 generators and ozone generators, as well as microwave, DC and RF power
 sources.
 
     Baratron, Mass-Flo, HPS and ASTeX are registered trademarks, and
 Integrated Component Subsystems, Spectra and D.I.P. are trademarks of MKS
 Instruments, Inc., Andover, Mass.
 
      For Further Information
      PR contact:
      Lara Torgesen
      Technical Marketing Programs
      408-737-0285
      lara@technicalmarketing.com
 
      Corporate contact:
      Lisa Robillard
      MKS Instruments
      978-975-2350 x5541
      lisa_robillard@mksinst.com
 
      Note: A jpeg image of the Micro-Baratron(R) Vista(TM) pressure transducer
 is available upon request. Please contact Kathryn Swisher at
 Kathryn@technicalmarketing.com to request photo.
 
 

SOURCE MKS Instruments, Inc.
    ANDOVER, Mass., April 12 /PRNewswire/ --MKS Instruments, Inc.,
 (Nasdaq:   MKSI) a supplier of components and subsystems for the semiconductor
 and thin-film industries, has introduced the new Micro-Baratron(R) Vista(TM)
 pressure transducer, a compact integrated gas pressure sensor for process tool
 manufacturers and gas delivery suppliers. The new transducer has a built in
 display and meets the requirements for space saving surface mount components
 that can be incorporated in 300mm tools. The 872B Micro-Baratron Vista can be
 easily installed on process tool gas delivery lines including gas box, gas
 panel, and gas delivery systems.
     Process tool designers now must provide systems for 300mm wafers that are
 no larger, and in some cases smaller, than the equivalent 200mm process tool.
 The figure of merit is the throughput divided by footprint area. For many
 tools that use process gases, a large amount of space is required for gas
 distribution systems, often aptly referred to as gas jungles. To save space,
 the industry is moving away from gas supply systems connected with in-line
 fittings to more compact "gas sticks" with surface mount fittings. Using this
 streamlined design, individual components can be closely spaced yet easily
 removed. Two standard seal types are emerging, termed "C" (SEMI Standard PR3)
 and "W" (SEMI Standard PR3.1).
     The Micro-Baratron Vista pressure transducer is less than five inches in
 overall height-the smallest integrated display sensor presently available-and
 is narrow enough to meet the 1-1/8" spacing requirement for easy downmount
 installation on a gas stick. The 15-pin D-type power connector is recessed on
 the side of the device and does not add additional height. Both C and W seal
 types are available. The onboard pressure display is adjustable in 90 degrees
 increments through 360 degrees for viewing from any desired angle. This unique
 capability makes it possible for maintenance technicians to monitor pressure
 directly, even if the central computer tool CRT display is not conveniently
 accessible. Full scale ranges are 1000 Torr, 100 PSIA and 250 PSIA, and the
 sensor has an accuracy of 1% of the pressure reading.
     For more information, call the MKS Applications Engineering Group at (800)
 227-8766/(978) 975-2350 or view our web site and on-line catalog
 (www.mksinst.com).
 
     MKS Instruments, Inc. is a global supplier of the broadest range of
 instruments, components and subsystems for vacuum and gas-based manufacturing
 processes. Pressure measurement and control products include Baratron(R)
 capacitance manometers and gas pressure transducers, as well as electronic
 pressure control subsystems. Materials Delivery & Analysis Products include
 Mass-Flo(R) controllers and subsystems for the delivery of vapors from liquids
 and solids, and Spectra(TM) quadrupole-based process monitors, residual gas
 analyzers, and optical sensors for the semiconductor and thin film industries.
 Vacuum products include HPS(R) vacuum components, valves, gauges, heaters and
 traps in addition to a complete line of process-specific Integrated Component
 Subsystems(TM) for manufacturing productivity enhancement. MKS D.I.P.(TM)
 Products group designs and manufactures digital control network products that
 are used in the semiconductor, commercial vehicle, oil and gas, and chemical
 processing industries. MKS ASTeX(R) Products manufactures reactive gas
 generators and ozone generators, as well as microwave, DC and RF power
 sources.
 
     Baratron, Mass-Flo, HPS and ASTeX are registered trademarks, and
 Integrated Component Subsystems, Spectra and D.I.P. are trademarks of MKS
 Instruments, Inc., Andover, Mass.
 
      For Further Information
      PR contact:
      Lara Torgesen
      Technical Marketing Programs
      408-737-0285
      lara@technicalmarketing.com
 
      Corporate contact:
      Lisa Robillard
      MKS Instruments
      978-975-2350 x5541
      lisa_robillard@mksinst.com
 
      Note: A jpeg image of the Micro-Baratron(R) Vista(TM) pressure transducer
 is available upon request. Please contact Kathryn Swisher at
 Kathryn@technicalmarketing.com to request photo.
 
 SOURCE  MKS Instruments, Inc.