Solid State Measurements Makes First Installation of SSM 610 Nondestructive Semiconductor Metrology System at Motorola DigitalDNA(TM) Laboratories

Apr 18, 2001, 01:00 ET from Solid State Measurements, Inc.

    PITTSBURGH, April 18 /PRNewswire/ -- Motorola's Semiconductor Products
 Sector (SPS) is the first semiconductor manufacturer to use a new technology
 that will revolutionize semiconductor metrology and open the door to the next
 generation of faster and smaller chips.
     Solid State Measurements, Inc. (SSM), has completed its first customer
 installation of the SSM 610 nondestructive semiconductor metrology system at
 Motorola's DigitalDNA(TM) Laboratories in Austin, Texas.  The SSM 610 measures
 the electrical characteristics of semiconductor wafers used by the laboratory
 in its research.  Motorola will use the SSM 610 as a key component of its
 program to develop thin oxide and high K materials for a new series of
 advanced semiconductors with line widths of 0.13 microns and below.
     "We are pleased that Motorola has chosen the SSM 610 to help advance its
 research program," said Charles Thomas, SSM's president and chief executive
 officer. "The sophisticated and precise metrology capabilities demanded by
 Motorola are exactly what we designed the SSM 610 to provide."
     "The SSM 610 is the right tool for our semiconductor research because it
 is both powerful and flexible," said Joe Mogab, director of Advanced Process
 Development and External Research for Motorola.  "To develop ever smaller and
 faster chips, we need a metrology system that provides precise and accurate
 measurements.  The SSM 610 gives us just that, and is able to do it as quickly
 as possible."
     The SSM 610 uses SSM's proprietary FastGate(TM) Elastic Probe technology
 to perform direct electrical measurements of semiconductor, oxide, and
 dielectric characteristics on large, complex wafers nondestructively at
 production speeds.  Motorola SPS will use its SSM 610 to test monitor wafers,
 but the production version SSM 6000 series tests both product and monitor
 wafers.
     "We expect both the SSM 600 series and the SSM 6000 series of metrology
 systems to be very popular with companies doing advanced semiconductor design
 or fabrication," said Thomas.
     The SSM 600 series is designed for research facilities.  The complementary
 SSM 6000 series, which also employs the unique FastGate Elastic Probe
 technology, will provide fabrication plants with nondestructive metrology of
 product wafers at production speeds.
     Motorola's DigitalDNA Laboratories is the umbrella research and
 development organization for the Semiconductor Products Sector.  As the
 world's #1 producer of embedded processors, Motorola's Semiconductor Products
 Sector offers multiple DigitalDNA(TM) technologies which enable its customers
 to create "smart" products and new business opportunities in the networking
 and computing, wireless communications, transportation, and home networking
 markets.  Motorola's worldwide semiconductor sales were $7.9 billion (USD) in
 2000.  www.Motorola.com/semiconductors.
     Solid State Measurements, Inc. (www.ssm-inc.com), founded in 1970, is an
 industry leader in the design and manufacture of equipment for semiconductor
 materials characterization.  SSM produces a powerful array of C-V and I-V
 systems as well as the automatic Spreading Resistance Probe.  The company uses
 contacting and non-contacting techniques for electrical measurement of
 semiconductor films and materials.
 
 

SOURCE Solid State Measurements, Inc.
    PITTSBURGH, April 18 /PRNewswire/ -- Motorola's Semiconductor Products
 Sector (SPS) is the first semiconductor manufacturer to use a new technology
 that will revolutionize semiconductor metrology and open the door to the next
 generation of faster and smaller chips.
     Solid State Measurements, Inc. (SSM), has completed its first customer
 installation of the SSM 610 nondestructive semiconductor metrology system at
 Motorola's DigitalDNA(TM) Laboratories in Austin, Texas.  The SSM 610 measures
 the electrical characteristics of semiconductor wafers used by the laboratory
 in its research.  Motorola will use the SSM 610 as a key component of its
 program to develop thin oxide and high K materials for a new series of
 advanced semiconductors with line widths of 0.13 microns and below.
     "We are pleased that Motorola has chosen the SSM 610 to help advance its
 research program," said Charles Thomas, SSM's president and chief executive
 officer. "The sophisticated and precise metrology capabilities demanded by
 Motorola are exactly what we designed the SSM 610 to provide."
     "The SSM 610 is the right tool for our semiconductor research because it
 is both powerful and flexible," said Joe Mogab, director of Advanced Process
 Development and External Research for Motorola.  "To develop ever smaller and
 faster chips, we need a metrology system that provides precise and accurate
 measurements.  The SSM 610 gives us just that, and is able to do it as quickly
 as possible."
     The SSM 610 uses SSM's proprietary FastGate(TM) Elastic Probe technology
 to perform direct electrical measurements of semiconductor, oxide, and
 dielectric characteristics on large, complex wafers nondestructively at
 production speeds.  Motorola SPS will use its SSM 610 to test monitor wafers,
 but the production version SSM 6000 series tests both product and monitor
 wafers.
     "We expect both the SSM 600 series and the SSM 6000 series of metrology
 systems to be very popular with companies doing advanced semiconductor design
 or fabrication," said Thomas.
     The SSM 600 series is designed for research facilities.  The complementary
 SSM 6000 series, which also employs the unique FastGate Elastic Probe
 technology, will provide fabrication plants with nondestructive metrology of
 product wafers at production speeds.
     Motorola's DigitalDNA Laboratories is the umbrella research and
 development organization for the Semiconductor Products Sector.  As the
 world's #1 producer of embedded processors, Motorola's Semiconductor Products
 Sector offers multiple DigitalDNA(TM) technologies which enable its customers
 to create "smart" products and new business opportunities in the networking
 and computing, wireless communications, transportation, and home networking
 markets.  Motorola's worldwide semiconductor sales were $7.9 billion (USD) in
 2000.  www.Motorola.com/semiconductors.
     Solid State Measurements, Inc. (www.ssm-inc.com), founded in 1970, is an
 industry leader in the design and manufacture of equipment for semiconductor
 materials characterization.  SSM produces a powerful array of C-V and I-V
 systems as well as the automatic Spreading Resistance Probe.  The company uses
 contacting and non-contacting techniques for electrical measurement of
 semiconductor films and materials.
 
 SOURCE  Solid State Measurements, Inc.