EHT Semi Integrates Bird RF Measurement to Strengthen Semiconductor Process Control

Embedded RF measurement provides consistency across calibration, process development, and production.

SEATTLE, Oct. 12, 2026 /PRNewswire/ -- EHT Semi today announced the integration of Bird RF measurement technology into its semiconductor power platforms, including the Orion™ Direct RF™ System and tailored waveform generators. An embedded Bird probe, with NIST-traceable calibration, provides the primary measurement of power, voltage, current, and impedance. The integration reflects a collaborative relationship between EHT Semi and Bird focused on applying industry-trusted RF measurement technology to the needs of semiconductor manufacturing.

By integrating the probes directly into its power systems, EHT Semi provides measurement continuity from factory calibration and system validation through test and measurement at the fab. The approach gives semiconductor manufacturers a common measurement reference across the equipment lifecycle, helping improve confidence in the RF power data used to characterize, verify, and control advanced processes.

The integrated Bird probe is now available in selected Orion™ Direct RF™ System and tailored-waveform power systems. The resulting measurement and control architecture enables power regulation to within 2% of the set point through fast, dynamic load changes, supporting the stability and responsiveness required for demanding plasma and process conditions.

"Advanced process control depends on knowing that the power measured during system calibration corresponds to the power monitored in production," said Timothy Ziemba, CEO of EHT Semi. "Integrating Bird measurement technology gives engineers a common RF reference from factory to fab, while supporting the speed and precision required for rapidly changing plasma loads."

"Bird is pleased that EHT Semi selected our RF measurement technology as an integral part of its semiconductor power platforms," said Bird's chief executive officer, Mike Simpson. "This integration will give equipment and process teams greater confidence in the data connecting calibration, development, and production."

Customers will have access to the measurement data generated by the integrated Bird probes. This high-fidelity data can support advanced diagnostics, process analytics, and the development of AI-accelerated feedback and control strategies. By making trusted power data available at the equipment level, EHT Semi is creating a foundation for faster process learning and more adaptive control development.

About EHT Semi
EHT Semi is pioneering advanced RF power and tailored waveform systems for semiconductor manufacturing. Its power platforms are designed to provide precise, responsive power delivery and measurement for improved plasma control and reliability in demanding semiconductor process environments. Learn more at ehtsemi.com.

About Bird
Founded in 1942, Bird is the trusted standard in RF power measurement and monitoring, delivering instruments, sensors, loads, attenuators, analyzers, handheld testers, and software used in the world's most demanding environments. Bird serves customers across semiconductor, public safety, telecommunications, defense & aerospace, broadcast, industrial, and medical markets from its headquarters in Solon, Ohio, and global locations. Learn more at birdrf.com.

SOURCE EHT Semi