Reportlinker Adds Semiconductor/Microelectronics Cleaning

Dec 14, 2010, 14:12 ET from Reportlinker

NEW YORK, Dec. 14, 2010 /PRNewswire/ -- Reportlinker.com announces that a new market research report is available in its catalogue:

Semiconductor/Microelectronics Cleaning

http://www.reportlinker.com/p0341188/Semiconductor/Microelectronics-Cleaning.html

The global market for microelectronics cleaning equipment, consumables, and services was worth about $2.9 billion in 2009.  This figure is projected to reach $3.4 billion in 2010 and $8 billion by 2015, a compound annual growth rate (CAGR) of 18.5% between 2010 and 2015.

Cleaning chemicals, gases and other consumables such as ultrapure water accounted for 62% of the market in 2009. This sector is worth an estimated $2.1 billion in 2010 and is expected to increase at a 19.1% compound annual growth rate (CAGR) to reach $5 billion in 2015.

Equipment sales accounted for 29% of the total microelectronics cleaning equipment market in 2009. This sector is valued at an estimated $1 billion in 2010 and is expected to reach $2.4 billion in 2015, a compound annual growth rate (CAGR) of 19.1%.

STUDY BACKGROUND

Electronics cleaning refers to the processes or steps that are employed to ensure that a semiconductor or other microelectronic device remains free from contaminants or other foreign materials that could have an adverse impact on its proper functioning and performance. New requirements are being placed on electronics cleaning technologies and products, because as device geometries continue to shrink and die sizes grow, microcontaminants such as particles, metallic impurities, and trace organic contaminants will have an ever-increasing detrimental impact on device yield and reliability.

Various other factors are contributing to the current dynamism of the electronics cleaning market. Process trends such as the movement to single-wafer processing pose new challenges for cleaning technology. Economic and environmental concerns are also causing users of electronics cleaning products to look for ways of reducing their chemicals consumption and substituting more environmentally benign chemicals for the harsh chemistries used in traditional "wet" process cleaning.

STUDY GOALS AND OBJECTIVES

In such a dynamic environment, technologies and markets for electronics cleaning are continually evolving.   This report is an update of a report published by BCC Research in May 2006. 

The goal of this updated study is to provide the reader with an understanding of recent developments in electronics cleaning applications, technologies, and products that will influence the future size and structure of the market for cleaning equipment and consumables. 

Specific objectives include identifying segments of the electronics cleaning market with the greatest commercial potential in the near to mid-term (2010 to 2015), identifying and, where possible, quantifying the key demand drivers, projecting future demand for cleaning equipment and supplies, and evaluating the challenges that must be overcome for each segment to realize its potential.

INTENDED AUDIENCE

The report is intended especially for vendors of electronics cleaning equipment, chemicals, gasses and other consumables. Other readers who should find it particularly useful include entrepreneurs, investors, venture capitalists and other readers with a need to know where the electronics cleaning market is headed over the next 5 years. 

The report should also be of interest to users of electronics cleaning products such as semiconductor manufacturers. Finally, members of technical and professional organizations such as the Semiconductor Industry Association should find the report useful.

SCOPE AND FORMAT

The report addresses the global market for electronics cleaning equipment, chemicals and other consumables, and cleaning-related services during the period from 2009 through 2015. It covers the entire range of products that are used to ensure that the wafer or other microelectronic device is free of contaminants and other unwanted foreign materials as it goes through the fabrication process, including:

Cleaning equipment

Solvents and other chemicals

Gases

Miscellaneous other consumables

Engineering, management, and maintenance services related to cleaning equipment and supplies.

The report format includes the following major elements:

Executive summary

Technology trends

Products and manufacturers

Key patents and patent analysis

Major applications in which electronics cleaning products are used (e.g., semiconductor, LCD display fabrication)

Market drivers

Global trends in the market for electronics cleaning products by technology, product type, application, and geographical region, 2009 to 2015

Electronics cleaning product manufacturer market shares.

METHODOLOGY AND INFORMATION SOURCES

The findings and conclusions of this report are based on information gathered from industry sources, including manufacturers and users of electronics cleaning equipment and chemicals.   Interview data were combined with information gathered through an extensive review of secondary sources such as trade publications, trade associations, company literature, and on-line databases to produce the market projections contained in this report. 

The base-year for analysis and projection is 2009. With 2009 as a baseline, market projections were developed for 2010 through 2015. These projections are based on a combination of a consensus among the primary contacts combined with our understanding of the key market drivers and their impact from a historical and analytical perspective. The analytical methodologies used to generate the market estimates are described in detail in the section on detailed market projections.

All dollar projections presented in this report are in 2009 constant dollars, unless otherwise noted.

ANALYST CREDENTIALS

Andrew McWilliams, the author of this report, is a partner in the Boston-based international technology and marketing consulting firm, 43rd Parallel LLC.  He is also the author of several BCC Research reports on related subjects, such as CHM045A Global Technologies for Lithographic Chemicals, SMC048A Semiconductor Microlithography: Materials and Markets, and SMC021C Ultrapure Materials for the Semiconductor Industry (co-author).

Chapter- 1: INTRODUCTION -- Complimentary

STUDY BACKGROUND 1

STUDY GOALS AND OBJECTIVES 1

INTENDED AUDIENCE 2

SCOPE AND FORMAT 2

METHODOLOGY AND INFORMATION SOURCES 3

ANALYST CREDENTIALS 3

RELATED BCC RESEARCH REPORTS 3

BCC ONLINE SERVICES 4

DISCLAIMER 4

Chapter-2: EXECUTIVE SUMMARY

SUMMARY TABLE GLOBAL SALES OF MICROELECTRONIC CLEANING EQUIPMENT, SUPPLIES AND SERVICES SALES, THROUGH 2015 ($ MILLIONS) 5

SUMMARY FIGURE GLOBAL SALES OF MICROELECTRONIC CLEANING EQUIPMENT, SUPPLIES AND SERVICES SALES, 2009-2015 ($ MILLIONS) 6

Chapter-3: CLEANING PROCESS OVERVIEW

GENERAL DESCRIPTION 7

DEFINITIONS 7

Cleaning 7

Stripping 7

Ashing 7

Etching 7

Front End of Line (FEOL) 8

Back End of Line (BEOL) 8

HISTORICAL NOTE 8

IMPORTANCE OF CLEANING TO THE ELECTRONICS INDUSTRY 9

GENERAL IMPORTANCE OF CLEANING 9

Device Processing Yield 9

Device Performance 10

Device Reliability 10

TYPES OF CONTAMINATION 10

Particles 10

Inorganic Chemicals 11

Organic Chemicals 11

Dissolved Organics and Bacteria 11

SOURCES OF CONTAMINATION 11

SPECIFIC APPLICATIONS 12

INTEGRATED CIRCUITS 12

PHOTOMASKS 13

PRINTED CIRCUIT BOARDS 14

Removal of Flux Residues from PCB Assemblies after Soldering 14

Removal of Solder Paste or Adhesive from Stencils or Misprints 15

HARD DISK DRIVES 15

Read/Write Heads 15

Storage Media 16

MEMS 16

FLAT PANEL DISPLAYS 17

IMAGE SENSORS 17

DEVELOPMENTS THAT MAY INFLUENCE MARKET FOR CLEANING TECHNOLOGIES 17

SHRINKING FEATURE SIZES 17

NEW MATERIALS 18

High-K Dielectrics 18

New Salicides 18

Copper 19

PROCESS-RELATED DEVELOPMENTS 19

Trend towards Single-Wafer Processing 19

Multiple-Use Tools 20

ITRS 20

TABLE 1 CLEANING PARAMETERS INFLUENCING DEVICE YIELD 20

ITRS (Continued) 21

Chapter-4: CLEANING TECHNOLOGIES, EQUIPMENT, CHEMICALS AND SERVICES

SUMMARY 22

TECHNOLOGIES, EQUIPMENT, AND CHEMICALS 22

WET PROCESS CLEANING 22

Technologies 22

Wet Cleaning Systems 23

Batch Immersion Cleaning Systems 23

Batch Spray Cleaning Systems 23

Single-Wafer Immersion Systems 24

Single-Wafer Spray Systems 24

Cleaning Chemistries 25

RCA Cleaning Chemistry 25

Piranha 26

Dilute Chemistries 26

Aqueous and Semi-Aqueous Chemistries 27

Single-Wafer Cleaning Chemistries 28

Dilute Sulfuric Peroxide, Plus (DSP+) 28

Applied Materials AM1 28

Dilute HF with Ozonated Water (SCROD) 28

Direct Application of Gaseous Ozone 29

Aqueous Foam 29

Ultrapure Water 29

Reverse Osmosis Systems 30

Deionization 30

Ion-Exchange Systems 30

Electrodialysis/Electrodialysis-Reversal (ED/EDR) Systems 31

Filtration 31

Applications 32

Semiconductor Manufacturing 32

Current Applications 32

Emerging Applications 33

Other Applications 33

Advantages and Disadvantages 34

Overall Advantages and Disadvantages of Wet Cleaning 34

Advantages and Disadvantages of Specific Wet Cleaning Technologies 35

Batch Immersion Systems 35

Batch Spray Systems 36

Single-Wafer Immersion Systems 36

Single-Wafer Spray Systems 37

Products and Manufacturers 37

Wet Cleaning Equipment 37

TABLE 2 WET CLEANING EQUIPMENT MANUFACTURERS 38

FIGURE 1 GLOBAL WET CLEANING EQUIPMENT MARKET SHARES, 2009 (%) 38

Wet Cleaning Chemicals 39

TABLE 3 WET CLEANING CHEMICAL MANUFACTURERS 39

FIGURE 2 GLOBAL WET CLEANING CHEMICAL MARKET SHARES, 2009 (%) 40

Water Purification Systems 40

TABLE 4 WATER PURIFICATION EQUIPMENT MANUFACTURERS 41

FIGURE 3 GLOBAL ULTRAPURE WATER MARKET SHARES, 2009 (%) 42

Patent Analysis 42

FIGURE 4 U.S. PATENTS ISSUED SINCE 1976 RELATING TO WET CLEANING TECHNOLOGIES (%) 43

Wet Cleaning Equipment 43

FIGURE 5 U.S. PATENTS ISSUED SINCE 1976 RELATING TO WET CLEANING EQUIPMENT, BY TYPE OF EQUIPMENT* (%) 44

TABLE 5 WET CLEANING EQUIPMENT IP PORTFOLIOS (NUMBER OF U.S. WET CLEANING EQUIPMENT PATENTS) 45

Wet Cleaning Chemicals 45

FIGURE 6 U.S. PATENTS ISSUED SINCE 1976 RELATING TO WET CLEANING CHEMICALS, BY TYPE OF CHEMICAL* (%) 45

FIGURE 6 (CONTINUED) 46

Ultrapure Water 46

FIGURE 7 U.S. PATENTS ISSUED SINCE 1976 RELATING TO ULTRAPURE WATER, BY TYPE OF PRODUCTION TECHNOLOGY* (%) 47

DRY PROCESS CLEANING 47

Technologies 47

Dry Cleaning Systems 48

Plasma Cleaning 48

FIGURE 8 TYPICAL (CAPACITIVE) RF PLASMA SYSTEM 48

Cryogenic Aerosol Cleaning 49

Laser Resist Stripping 49

Ultraviolet/Ozone Cleaning 50

Dry Cleaning Gases 50

TABLE 6 DRY CLEANING GASES 50

Applications 51

Advantages and Disadvantages 51

Products and Manufacturers 52

Equipment 52

TABLE 7 DRY CLEANING EQUIPMENT MANUFACTURERS 52

FIGURE 9 GLOBAL DRY CLEANING EQUIPMENT MARKET SHARES, 2009 (%) 53

Consumables 53

TABLE 8 DRY CLEANING GAS MANUFACTURERS 54

FIGURE 10 GLOBAL DRY CLEANING GAS MARKET SHARES, 2009 (%) 54

FIGURE 10 (CONTINUED) 55

Patent Analysis 55

FIGURE 11 U.S. PATENTS ISSUED SINCE 1976 AND PATENT APPLICATIONS PENDING THAT RELATE TO DRY PROCESS CLEANING (%) 55

FIGURE 11 (CONTINUED) 56

EMERGING ELECTRONICS CLEANING TECHNOLOGIES 56

Supercritical Co2 Process 56

Technology 56

Applications 57

Advantages and Disadvantages 58

Manufacturers 58

TABLE 9 SUPERCRITICAL CO2 CLEANING EQUIPMENT MANUFACTURERS 58

Patent Analysis 59

FIGURE 12 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO SCCO2 CLEANING (%) 59

FIGURE 12 (CONTINUED) 60

Anhydrous SO3 Cleaning 60

Technology 60

Applications 60

Advantages and Disadvantages 61

Developers and Manufacturers 61

Patent Analysis 61

FIGURE 13 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO SO3 CLEANING (%) 61

FIGURE 13 (CONTINUED) 62

Laser-Induced Shockwave Cleaning (LSC) 62

Technology 62

Applications 62

Advantages and Disadvantages 63

Manufacturers 63

Patent Analysis 63

Other Technologies 63

Nanoprobe Cleaning 63

New Cryogenic Aerosols 63

Vapor Cleaning 64

CONTAMINATION DETECTION TECHNOLOGIES 64

TECHNOLOGY 64

TABLE 10 CONTAMINANT DETECTION AND CHARACTERIZATION TECHNOLOGIES 65

Laser Backscattering 65

Optical Microscopy 66

Other Technologies 66

ADVANTAGES AND DISADVANTAGES 66

TABLE 11 CONTAMINANT DETECTION AND CHARACTERIZATION TECHNOLOGIES ADVANTAGES AND DISADVANTAGES 66

MANUFACTURERS 67

TABLE 12 MANUFACTURERS OF CONTAMINANT DETECTION SYSTEMS 67

FIGURE 14 CONTAMINANT DETECTION SYSTEM MARKET LEADERS, 2009 (PERCENT OF TOTAL SALES) 68

PATENT ANALYSIS 68

FIGURE 15 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO CONTAMINATION DETECTION SYSTEMS, BY TYPE OF TECHNOLOGY 69

FIGURE 16 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO CONTAMINATION DETECTION SYSTEMS, BY ASSIGNEE (%) 70

CLEANING-RELATED CONTRACT SERVICES 70

TABLE 13 COMPANIES PROVIDING OUTSOURCED MICROELECTRONICS CLEANING SERVICES 71

Chapter-5: GLOBAL MARKET FOR ELECTRONICS CLEANING EQUIPMENT, SUPPLIES AND SERVICES, 2009â€"2015

SUMMARY 72

OVERALL MARKET 72

TABLE 14 GLOBAL SALES OF MICROELECTRONIC CLEANING EQUIPMENT, SUPPLIES AND SERVICES, THROUGH 2015 ($ MILLIONS) 72

FIGURE 17 MICROELECTRONIC CLEANING EQUIPMENT AND SUPPLIES MARKET TRENDS, 2009–2015 ($ MILLIONS) 73

FIGURE 18 SALES OF MICROELECTRONICS CLEANING EQUIPMENT VS. SUPPLIES MARKET BY TYPE OF PROCESS, 2009 AND 2015 (PERCENT OF GLOBAL ELECTRONICS CLEANING SALES) 74

MARKET BY TYPE OF TECHNOLOGY 75

FIGURE 19 MICROELECTRONICS CLEANING MARKET BY TYPE OF PROCESS* (PERCENT OF GLOBAL ELECTRONICS CLEANING SALES) 75

MARKET BY TYPE OF APPLICATION 76

FIGURE 20 MICROELECTRONICS CLEANING MARKET BY TYPE OF APPLICATION, 2009–2015 (PERCENT OF GLOBAL ELECTRONICS CLEANING SALES) 76

MARKET BY REGION 77

FIGURE 21 MICROELECTRONICS CLEANING MARKET SHARES BY REGION, 2009–2015 78

DETAILED ESTIMATES AND PROJECTIONS 79

WET PROCESS MARKET 79

2009 Sales 79

FIGURE 22 GLOBAL SALES OF WET CLEANING EQUIPMENT, CHEMICALS, AND ULTRAPURE WATER, 2009 (%/$ MILLION) 79

Equipment 80

FIGURE 23 SALES OF WET CLEANING EQUIPMENT BY TYPE OF EQUIPMENT, 2009 (%/$ MILLION) 80

Chemicals 81

FIGURE 24 CONSUMPTION OF WET CLEANING CHEMICALS BY TYPE OF CHEMICAL, 2009 ($ MILLIONS/% 81

Ultrapure Water 82

Market Drivers 82

Trends in Global Semiconductor Production 82

TABLE 15 GLOBAL SEMICONDUCTOR PRODUCTION, THROUGH 2015 ($ BILLIONS) 83

FIGURE 25 TRENDS IN GLOBAL SEMICONDUCTOR PRODUCTION, 2009–2015 ($ BILLION) 83

Growing Complexity of Semiconductors 84

FIGURE 26 TRENDS IN FEOL VS. BEOL CLEANING STEPS, 2009 AND 2015 (% OF ALL CLEANING STEPS) 84

Trend Towards 450 mm Wafers 85

TABLE 16 SALES OF SINGLE WAFER CLEANING TOOLS, THROUGH 2015 ($ MILLIONS) 86

FIGURE 27 TRENDS IN SALES OF SINGLE-WAFER CLEANING EQUIPMENT, 2009–2015 86

New Interconnect Materials 87

TABLE 17 SALES OF LOW-K DIELECTRIC MATERIALS USED IN SEMICONDUCTOR PRODUCTION, THROUGH 2015 ($ MILLIONS) 87

FIGURE 28 TRENDS IN SALES OF LOW-K DIELECTRIC MATERIALS USED IN SEMICONDUCTOR PRODUCTION, 2009-2015 ($ MILLIONS) 87

Diversification of Wet Cleaning Chemistry Suppliers 88

Growing Importance of Non-Semiconductor Applications 88

FIGURE 29 TRENDS IN SEMICONDUCTOR VS. NON-SEMICONDUCTOR APPLICATIONS FOR WET CLEANING EQUIPMENT, 2009 AND 2015 (%/$ BILLION) 88

Projected Market, 2010–2015 89

Summary 89

TABLE 18 SALES OF WET PROCESS CLEANING EQUIPMENT AND CHEMICALS, THROUGH 2015 ($ MILLIONS) 90

Equipment 90

TABLE 19 SALES OF WET PROCESS CLEANING TOOLS, 2009–2015 ($ MILLIONS) 90

TABLE 20 SALES OF WET PROCESS CLEANING CHEMISTRIES, THROUGH 2015 ($ MILLIONS) 91

FIGURE 30 TRENDS IN WET CLEAN EQUIPMENT MARKET SHARES, 2009 AND 2015 (%) 92

Chemicals 93

TABLE 21 SALES OF ULTRAPURE WATER, THROUGH 2015 ($ MILLIONS) 94

FIGURE 31 TRENDS IN WET CLEAN CHEMISTRY MARKET SHARES, 2009–2015 (%) 94

FIGURE 31 (CONTINUED) 95

Ultrapure Water 95

DRY PROCESS MARKET 96

2009 Sales 96

FIGURE 32 GLOBAL SALES OF DRY CLEANING EQUIPMENT AND CHEMICALS, 2009 ($ MILLIONS) 96

Equipment 96

FIGURE 33 SALES OF DRY CLEANING EQUIPMENT BY TYPE OF EQUIPMENT, 2009 ($ MILLIONS) 97

Gases 98

FIGURE 34 CONSUMPTION OF DRY CLEANING GASES BY TYPE OF GAS, 2009 ($ MILLIONS) 98

Market Drivers 99

Overall Resist Consumption 99

TABLE 22 SALES OF RESIST MATERIALS, THROUGH 2015 ($ MILLIONS) 100

FIGURE 35 TRENDS IN GLOBAL MARKET FOR RESIST MATERIALS, 2009–2015 ($ MILLIONS) 100

Use of New Resist and Semiconductor Materials 100

Overall Sales of Ozone Generation Systems 101

TABLE 23 SALES OF OZONE TECHNOLOGY, THROUGH 2015 ($ MILLIONS) 101

FIGURE 36 TRENDS IN GLOBAL MARKET FOR OZONE TECHNOLOGY ($ MILLIONS) 102

Projected Market, 2010–2015 102

Summary 102

TABLE 24 SALES OF DRY PROCESS CLEANING EQUIPMENT AND GASES, 2009–2015 ($ MILLIONS) 102

Equipment 103

TABLE 25 SALES OF DRY PROCESS CLEANING TOOLS, THROUGH 2015 ($ MILLIONS) 103

Gases 103

TABLE 26 SALES OF DRY CLEANING PROCESS GASES, THROUGH 2015 ($ MILLIONS) 104

FIGURE 37 TRENDS IN DRY STRIP TECHNOLOGY MARKET SHARES, 2009 AND 2015 (%) 104

FIGURE 37 (CONTINUED) 105

FIGURE 38 TRENDS IN DRY STRIP TECHNOLOGY MARKET SHARES, 2009 AND 2015 (%) 106

MARKETS FOR EMERGING CLEANING TECHNOLOGIES 107

Supercritical Carbon Dioxide (SCCO2) 107

2009 Sales 107

Market Drivers 107

Trend towards Advanced and Next Generation Lithography (NGL) Technologies 107

FIGURE 39 TRENDS IN SALES OF NGL VS. OTHER PHOT0RESIST TYPES, 2009–2015 ($ MILLIONS) 108

FIGURE 39 (CONTINUED) 109

Projected Market, 2010 to 2015 109

Equipment 109

TABLE 27 SALES OF SCCO2 CLEANING TOOLS, THROUGH 2015 ($ MILLIONS) 109

Carbon Dioxide 109

TABLE 28 CARBON DIOXIDE CONSUMPTION BY SCCO2 CLEANING TOOLS, THROUGH 2015 ($ MILLIONS) 110

Other Emerging Cleaning Technologies 110

MARKETS FOR CLEANING-RELATED SERVICES 110

2009 Sales 110

FIGURE 40 MARKET FOR CLEANING-RELATED SERVICES, 2009 (%) 111

Market Drivers 111

Semiconductor Industry Purchases of Outside Services 111

FIGURE 41 RECENT TRENDS IN U.S. SEMICONDUCTOR INDUSTRY PURCHASES OF SELECTED CONTRACT SERVICES, 1997-2007 ($ MILLIONS/PERCENT OF TOTAL SHIPMENT VALUE) 112

Projected Market, 2010 to 2015 112

TABLE 29 SALES OF CLEANING-RELATED CONTRACT SERVICES, THROUGH-2015 ($ MILLIONS) 113

MARKETS FOR CONTAMINANT DETECTION SYSTEMS 113

FIGURE 42 SEMICONDUCTOR AND OTHER MICROELECTRONICS INSPECTION SYSTEM SALES, 2009 ($ MILLIONS) 114

TABLE 30 SALES OF SEMICONDUCTOR AND OTHER MICROELECTRONICS INSPECTION SYSTEMS, THROUGH 2015 ($ MILLIONS) 115

OTHER FACTORS THAT MAY INFLUENCE THE MARKET FOR CLEANING EQUIPMENT AND SUPPLIES 115

ENVIRONMENTAL, HEALTH AND SAFETY ISSUES 115

Environmental, Health and Safety Issues Continued) 116

Environmental, Health and Safety Issues Continued) 117

Environmental, Health and Safety Issues Continued) 117

Chapter-6: INDUSTRY STRUCTURE

NUMBER/SIZE OF FIRMS 118

FIGURE 43 MICROELECTRONICS CLEANING EQUIPMENT MANUFACTURERS BY ANNUAL SALES LEVEL, 2009 ($ MILLIONS/%) 118

FIGURE 43 (CONTINUED) 119

CLEANING PRODUCT SPECIALIZATION 119

TABLE 31 MICROELECTRONICS CLEANING EQUIPMENT MANUFACTURER SALES OF CLEANING EQUIPMENT VS. TOTAL SALES ($ MILLIONS) 119

FIGURE 44 MICROELECTRONICS CLEANING EQUIPMENT MANUFACTURER SPECIALIZATION RATIOS, 2009 (CLEANING EQUIPMENT SALES AS PERCENTAGE OF TOTAL SALES) 120

NATIONALITY 121

FIGURE 45 NATIONALITY OF MICROELECTRONICS CLEANING EQUIPMENT MANUFACTURERS (%) 121

OWNERSHIP TRENDS 122

Chapter-7: VENDOR PROFILES

AIR PRODUCTS AND CHEMICALS, INC. 123

AKRION, INC.6330 HEDGEWOOD DRIVE, #150 123

APPLIED MATERIALS INC. 123

ATMI INC 124

AUSTIN AMERICAN TECHNOLOGY 125

AXCELIS TECHNOLOGIES INC. 125

AXIC INC. 126

AZ ELECTRONIC MATERIALS 126

THE BOC GROUP PLC 126

CANON U.S., INC. 127

CYANTEC INC. 127

DONGJIN SEMICHEM KGIT 23RD FLOOR 128

DONGWOO FINE CHEMICALS CO., LTD. 128

DUPONT ELECTRONIC TECHNOLOGIES 129

EV GROUP 129

FMC INDUSTRIAL CHEMICALS 129

FSI INTERNATIONAL INC 130

GENERAL CHEMICAL CORP. 130

HITACHI LTD. 130

HONEYWELL ELECTRONIC MATERIALS 131

JEOL LTD. 131

KANTO CORP. 131

KLA-TENCOR CORP. 132

L'AIR LIQUIDE SA 132

LAM RESEARCH CORP. 132

LEICA MICROSYSTEMS AG 133

LOTUS SYSTEMS GMBH 133

MACDERMID, INC. 133

MALLINCKRODT BAKER INC. 133

MATHESON TRI-GAS, INC. 134

MATTSON TECHNOLOGY, INC 134

MERCK KGA 134

MICELL TECHNOLOGIES, INC 135

MITSUBISHI CHEMICAL CORP. 135

MKS INSTRUMENTS, INC 136

NANOMETRICS, INC. 136

NIKON CORP. 136

NOVASCAN TECHNOLOGIES, INC. 137

NOVELLUS SYSTEMS, INC. 137

OLYMPUS CORP. 137

OSRAM SYLVANIA INC. 138

PENTAGON TECHNOLOGIES INC. 138

PRAXAIR, INC. 139

PSK, INC. 139

QUANTUMCLEAN, INC. 139

RD CHEMICAL 140

ROHM AND HAAS COMPANY 140

SAMCO, INC. 140

SHIBAURA MECHATRONICS CORP. 141

SOLVAY S.A. 141

STOELTING 141

SUMITOMO CHEMICAL CO. LTD. 142

SUSS MICROTEC AG 142

TOYO NIPPON SANSO CORP. 142

TEPLA AG 143

TOKYO ELECTRON LTD. 143

TOKYO OHKA KOGYO CO., LTD. 144

WAKO PURE CHEMICAL INDUSTRIES, LTD. 144

ZESTRON CORP. 144

To order this report:

Electronic Component and Semiconductor Industry: Semiconductor/Microelectronics Cleaning

Electronic Component and Semiconductor Business News

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