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Revasum anuncia un aumento en la productividad de su producto CMP insignia, el 6EZ
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The future of Silicon Carbide Single-Wafer Processing

News provided by

Revasum

Jul 12, 2023, 09:21 ET

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  • Revasum (ASX: RVS) anuncia un aumento de más del 20% en la productividad de su producto CMP insignia para la fabricación de obleas de carburo de silicio, el 6EZ, logrado mediante la implantación de mejoras en el software de control de manejo de obleas

SAN LUIS OBISPO, California, 12 de julio de 2023 /PRNewswire/ -- Revasum ha anunciado hoy el lanzamiento de mejoras en el software de control del sistema para su herramienta insignia CMP de carburo de silicio, 6EZ, que aumentan el rendimiento del sistema hasta en un 20% o más. Las mejoras de rendimiento se incluyen en nuestra última versión SW 3.1 e incluyen una serie de mejoras en el software de control de manejo de obleas 6EZ. La actualización se implantó con éxito en los sistemas de producción 6EZ existentes en las fábricas de varios clientes de nivel 1. Este software reduce significativamente el coste de propiedad de 6EZ por oblea para nuestros clientes.

"El software de control de manejo de obleas en versiones anteriores del software 6EZ incluía movimientos de manejo de obleas que se optimizaron para algunas de las primeras recetas de pulido de SiC, pero impusieron restricciones innecesarias para las recetas de producción que llevan a cabo actualmente nuestros clientes. Al eliminar estas restricciones e implantar otras mejoras en el manejo de obleas, pudimos aumentar significativamente el rendimiento de la herramienta sin ningún impacto negativo en la fiabilidad de la herramienta. También nos hemos asegurado de que estas mejoras no cambien los excelentes resultados del proceso de las recetas de producción que utilizan actualmente nuestros clientes", destacó Bill Kalenian, vicepresidente de ingeniería de Revasum.

"Desde que logramos nuestros objetivos iniciales de demostrar operaciones fiables de gran volumen y resultados de pulido repetibles y de alta calidad en sustratos duros de SiC, era el momento adecuado para que Revasum permitiera una mayor productividad para nuestros clientes a medida que aumentan los volúmenes de obleas. SW 3.1 permite un aumento significativo en la productividad y tiene una serie de otras características nuevas que mejorarán la flexibilidad y confiabilidad del 6EZ en la producción de alto volumen", comentó Scott Jewler, consejero delegado de Revasum. 'La versión 3.1 del software se instaló y lanzó a la producción en varios clientes líderes de sustratos de SiC y se enviará instalado en pedidos futuros".

Acerca de Revasum, Inc.:

Revasum se especializa en el diseño y fabricación de equipos de esmerilado y pulido para la fabricación de semiconductores. Revasum ha aprovechado su importante cartera de propiedad intelectual para desarrollar dos productos emblemáticos diseñados desde cero para el carburo de silicio. Los nuevos productos se pueden configurar para tamaños de oblea de SiC de hasta 200 mm.

Contacto de medios:
Bruce Ray
bruce.ray@revasum.com

Logo - https://mma.prnewswire.com/media/2147901/Revasum_Black_Logo.jpg

 

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