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Spirox y Southport lanzan el primer sistema de inspección de defectos de SiC no destructivo de la industria
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Spirox Corporation

Nov 28, 2023, 04:00 ET

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-Spirox y Southport lanzan el primer sistema de inspección de defectos de SiC no destructivo de la industria: ahorro de costes significativos y aumento de la producción

HSINCHU, 28 de noviembre de 2023 /PRNewswire/ -- Spirox Corporation (TWSE: 3055) y su filial, Southport Corporation, lanzan el primer sistema de inspección de defectos no destructivo JadeSiC-NK de la industria. JadeSiC-NK emplea tecnología óptica no lineal de última generación para el escaneo de oblea completa de sustratos de SiC para identificar defectos mortales. Sustituye el actual método de grabado con KOH (hidróxido de potasio), destructivo y de alto coste, lo que conduce a mayores rendimientos de producción y mejoras en los procesos. Calculando en base a la necesidad de grabar dos sustratos para cada lingote de SiC en el proceso KOH, JadeSiC-NK puede ahorrar aproximadamente 7,68 millones de dólares en costes anuales incurridos debido a pérdidas de grabado para un fabricante de sustratos con 100 hornos de crecimiento de cristales.

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Spirox and Southport Launch Industry-first Non-Destructive SiC Defect Inspection System, Targeting the Compound Semiconductor Market
Spirox and Southport Launch Industry-first Non-Destructive SiC Defect Inspection System, Targeting the Compound Semiconductor Market

La calidad de los materiales del sustrato determina la fiabilidad y el rendimiento de los chips de SiC. Sin embargo, el número de defectos y las distribuciones del cristal del sustrato sólo pueden inspeccionarse mediante muestreo con interpolación matemática cuando se utiliza el método destructivo de grabado con KOH. Si los fabricantes de sustratos de SiC pueden implementar una inspección no destructiva de los materiales en el proceso de fabricación, no solo reducirán el uso de soluciones químicas nocivas asociadas con el grabado con KOH, sino que también permitirán la detección temprana de defectos.

El director general de Southport, Jay Wang, afirmó: "Las tecnologías ópticas tradicionales sólo pueden detectar defectos superficiales no cristalinos. JadeSiC-NK permite un escaneo de la superficie de toda la oblea hasta una profundidad específica para identificar eficientemente defectos mortales (BPD, TSD, MicroPipe, Stacking Fallo). En comparación con el método de grabado KOH, JadeSiC-NK puede ahorrar significativamente tiempo de inspección y costes de sustrato. Además, JadeSiC-NK permite una inspección del 100% de la oblea para el mismo lingote, lo que facilita el análisis detallado del lingote y el análisis de trazabilidad de lotes que ayudarán a los clientes en optimización de procesos y rendimientos.

El Dr. Hao-Chung Kuo, profesor titular del Departamento de Ingeniería Optoelectrónica de la NYCU de Taiwán, afirmó: "Al aplicar tecnología óptica no lineal, se espera que JadeSiC-NK supere los obstáculos técnicos actuales de la industria en la mejora de procesos. Se espera que JadeSiC -NK establezca estándares industriales para la inspección de sustratos de SiC, convirtiéndose en una marca líder en la industria de tecnología óptica no lineal y liderando innovaciones y avances continuos en aplicaciones de campo".

El consejero delegado de Spirox, Paul Yang, dijo "Spirox ha ido ampliando continuamente su inversión para desarrollar soluciones que satisfagan las necesidades de los clientes. Con Southport, Spirox amplía nuestra cartera de productos, desde equipos de prueba de semiconductores hasta inspección óptica. La atención se centra inicialmente en la muy prometedora inspección de defectos de materiales semiconductores compuestos. Además de aplicar tecnología óptica no lineal en el recién lanzado JadeSiC-NK, Spirox planea acelerar la comercialización de tecnologías avanzadas de inspección óptica en áreas como MicroLED, metamateriales, fotónica de silicio, etc., en el futuro".

Ken Tai, presidente de la Asociación de Desarrollo de Tecnología e Industria Fotónica de Taiwán, dijo: "Es un gran placer ver a dos empresas taiwanesas creando sinergia a través de una colaboración mutuamente beneficiosa, generando un valor tremendo para la industria. JadeSiC-NK representa un avance tecnológico innovador. No es solo un producto revolucionario para la floreciente industria global de semiconductores compuestos, capaz de reducir significativamente los costes y aumentar la capacidad de producción, sino también muestra el liderazgo tecnológico de Taiwán con Spirox y Southport como representantes".

Foto - https://mma.prnewswire.com/media/2286948/Spirox_and_Southport_Launch_Industry_first_Non_Destructive_SiC_Defect_In.jpg

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