Akrion Systems Ships Single Wafer System to Asia

ALLENTOWN, Pa., May 17, 2011 /PRNewswire/ -- Akrion Systems LLC ("Akrion Systems"), a supplier of advanced surface preparation processes and equipment for microelectronics and solar device manufacturers, announced today that the company has placed a Velocity single wafer tool at a leading edge memory products manufacturer in Asia for the purpose of demonstrating its pre-lithography cleaning capabilities.

Velocity is Akrion Systems' most advanced single-wafer platform and more than sixty single wafer systems are currently installed. The platform employs controlled physical force technologies, ultra-dilute chemicals and de-ionized and functional water for critical cleaning applications.  Velocity's technology advantages are focused on the Goldfinger® front- and back-side megasonics.  The megasonics deliver very high particle removal efficiency with very low critical dimension loss and no damage. The system has the capability of simultaneous defect removal from the front, back and bevel edge of the wafer, thus offering a significant cost of ownership advantage.  Velocity can be configured to perform a variety of applications including sensitive structure defect removal, pre-lithography cleaning, back side and bevel edge cleaning, TSV cleaning and resist stripping.  

Michael Ioannou, Akrion Systems President and CEO, said, "The stellar performance of our Velocity system has been proven in the volume production of various advanced devices in numerous state-of-the-art fabs worldwide.  We are excited to have this opportunity to expand our installed base and prove to a new customer the many advantages of our single wafer platform."

About Akrion Systems

Akrion Systems provides advanced surface preparation process solutions and systems, including single-wafer and batch-immersion cleaning tools for the microelectronic, display and photovoltaic industries. Akrion Systems' customers produce a diverse range of products, including solar cells, integrated circuits for DRAM, Flash, Logic and MEMS as well as new and reclaimed semiconductor wafers, flat panel displays, and photomasks. The company's headquarters in Allentown, Pennsylvania includes a class-1 clean room for process development and an ISO 9001:2000 compliant production facility. For further information, please visit the Akrion Systems web site: http://www.akrionsystems.com.

SOURCE Akrion Systems LLC