Canon Launches Sales Of New FPA-3030EX6 KrF Excimer Laser Stepper In Preparation For Expanding IoT Market

With the dawn of the IoT, in addition to PCs and smartphones, cars, appliances, industrial equipment, all manner of "things" will be equipped with sensors and communication devices that allow them to connect to the internet to send and receive data. Canon, anticipating the expansion of the market for such devices, has begun sales of the FPA-3030EX6 for the production of analog semiconductors, sensors and communication devices.

The KrF excimer laser stepper, which accommodates small-sized substrates with diameters of 200mm or less, inherits the functionality of its predecessor, the FPA-3000EX6, while also offering compatibility with special substrates used in the fabrication of a multitude of devices to meet the diverse needs of semiconductor manufacturers.

The fabrication of IoT-related devices and power devices involves a variety of substrate materials including silicon, sapphire, silicon carbide and glass, as well as varying wafer diameters and thicknesses. Sharing the same wafer feeding system as the FPA-3030i5+ i-line stepper² (released in June 2012), with a proven track record handling special and small-sized substrates, the FPA-3030EX6 is capable of handling a variety of substrate types.

The new stepper delivers one of the highest levels³ of resolution, overlay accuracy and productivity (throughput) among KrF excimer laser steppers in the same class. The FPA-3030EX6 platform uses the same reticle and recipe as the FPA-3000EX6, making possible the effective utilization of existing equipment and assets.

About Canon U.S.A., Inc.      
Canon U.S.A., Inc., is a leading provider of consumer, business-to-business, and industrial digital imaging solutions to the United States and to Latin America and the Caribbean (excluding Mexico) markets. With approximately $31 billion in global revenue, its parent company, Canon Inc. (NYSE:CAJ), ranked third overall in U.S. patents granted in 2015† and is one of Fortune Magazine's World's Most Admired Companies in 2016. Canon U.S.A. is committed to the highest level of customer satisfaction and loyalty, providing 100 percent U.S.-based consumer service and support for all of the products it distributes. Canon U.S.A. is dedicated to its Kyosei philosophy of social and environmental responsibility. In 2014, the Canon Americas Headquarters secured LEED® Gold certification, a recognition for the design, construction, operations and maintenance of high-performance green buildings. To keep apprised of the latest news from Canon U.S.A., sign up for the Company's RSS news feed by visiting www.usa.canon.com/rss and follow us on Twitter @CanonUSA. 

† Based on weekly patent counts issued by United States Patent and Trademark Office.

¹ A semiconductor lithography system that utilizes a 248 nm exposure wavelength laser generated by combining the noble gas krypton (Kr) and the halogen gas fluoride (F).

² A semiconductor lithography system that utilizes a 365 nm wavelength mercury lamp as the light source.

³ As of July 4, 2016, based on a Canon survey.

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SOURCE Canon U.S.A., Inc.

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