Cymer Announces Focus Drilling Technology for Immersion Light Sources

Technology for XLR and XLA Series Immersion Light Sources Leads to Higher Yield

Mar 01, 2011, 08:00 ET from Cymer, Inc.

SAN DIEGO, March 1, 2011 /PRNewswire/ -- At SPIE Advanced Lithography 2011, Cymer, Inc. (Nasdaq: CYMI), the world's leading supplier of light sources used by chipmakers to pattern advanced semiconductor chips, today announced the development of new focus drilling technology for its immersion light sources including the XLR 600ix, XLR500i,  XLA 400 and XLA 300. Focus drilling provides up to a 2X improvement in the depth of focus on the wafer, thereby enabling a larger process window that can positively impact chipmakers' yield.

Laser focus drilling technology was developed to aid chipmakers in patterning deep contact and via structures with thick resists where high depth of focus is required. Cymer's focus drilling solution is supported by a technique involving operation of the light source at multiple bandwidths utilizing metrology that was designed to measure high-bandwidth spectra. Additionally, the unique spectral shape of Cymer's light sources can improve depth of focus with minimal impact on other key process parameters.

"This technology and its benefits to chipmakers is the result of more than five years of development effort at Cymer, investigating multiple approaches to improving depth of focus through spectral engineering," said Ed Brown, president and chief operating officer of Cymer. "Our close collaboration over the past year with our direct scanner and chipmaker customers was instrumental in developing an optimum solution."

Light sources equipped with focus drilling are being qualified, and are currently under chipmaker evaluation.

For additional information, or to speak with a representative, please contact Erin Coller at 619.234.0345 or

About Cymer

Cymer, Inc. (Nasdaq: CYMI) is the market leader in developing light sources, used by chipmakers worldwide to pattern advanced semiconductor chips, and is pioneering a new silicon crystallization system for the flat panel display industry. Cymer's light sources have been widely adopted by the world's top chipmakers and the company's installed base comprises approximately 3,500 systems. Continuing its legacy of leadership, Cymer is currently pioneering the industry's transition to extreme ultraviolet (EUV) lithography, the next viable step on the technology roadmap for the creation of smaller, faster chips. The company is headquartered in San Diego, Calif., and supports its customers from numerous offices around the globe. Cymer maintains a Web site to which it regularly posts press releases, SEC filings, and additional information about Cymer.  Interested persons can also subscribe to automated e-mail alerts or RSS feeds. Please visit

Cymer and all other Cymer product or service names used herein are either registered trademarks or trademarks of Cymer, Inc. Any other marks mentioned herein are the property of their respective holders.

Forward Looking Statements

Statements in this press release that are not strictly historical in nature are forward-looking statements. These statements include, but are not limited to statements regarding the advantages and benefits of the company's products and technologies, the company's competitive position and continued technology leadership, and the industry's transition to EUV lithography. These statements are predictions based on current information and expectations and involve a number of risks and uncertainties. Actual events or results may differ materially from those projected in any of such statements due to various factors, including but not limited to: the performance and market acceptance of the company's new products or technologies; new and enhanced product offerings by competitors; the company's ability to meet its production and product development schedules; the rate at which semiconductor manufacturers adopt new technologies and purchase and take delivery of photolithography tools from the company's customers; the company's ability to secure adequate supplies of critical components for its advanced products; cyclicality in the market for semiconductor manufacturing equipment; the timing of customer orders, shipments and acceptances; the policies and actions of the United States and other governments; and general economic conditions. For a discussion of these and other factors which may cause our actual events or results to differ from those projected, please refer to the company's most recent annual report on Form 10-K and quarterly reports on Form 10-Q, as well as other subsequent filings with the Securities and Exchange Commission (SEC). You are cautioned not to place undue reliance on these forward-looking statements, which speak only as of the date of this press release. All forward-looking statements are qualified in their entirety by this cautionary statement, and the company undertakes no obligation to revise or update any forward-looking statements to reflect events or circumstances after the date of this press release.

SOURCE Cymer, Inc.