Multiple Chipmakers Install Cymer's Focus Drilling Technology On Immersion Light Sources

Chipmakers Realize an Increase in Depth of Focus for Contact and Via Applications

Jul 09, 2012, 11:00 ET from Cymer, Inc.

SAN DIEGO, July 9, 2012 /PRNewswire/ -- Cymer, Inc. (Nasdaq: CYMI), the world's leading supplier of light sources used by chipmakers to pattern advanced semiconductor chips, today announced its focus drilling technology for ArF immersion light sources has been adopted by leading chipmakers since its introduction in March 2011. Designed to support the extension of 193nm immersion lithography, focus drilling customers are currently using the technology to improve depth of focus without compromising critical dimension (CD) uniformity, performance or productivity.


Focus drilling is a process of broadening the light source bandwidth that leads to a higher depth of focus needed for contacts and vias. The technology leverages unique advancements in the light source line narrowing module (LNM) and bandwidth analysis module (BAM).

"We are pleased that our extensive customer collaboration has led to successful on-wafer results at multiple chipmakers," said Ed Brown, president and chief operating officer of Cymer. "As a result, we have now shipped this technology for new tools and upgrades to the installed base."

Available for the XLR 600ix, XLR 500i, XLA 400 and XLA 300 light sources, Cymer's focus drilling technology is part of Cymer's OnPulse™ family of support products currently installed around the world. For additional information, or to speak with a representative, please contact

About Cymer

Cymer, Inc. (Nasdaq: CYMI) is the market leader in developing light sources, used by chipmakers worldwide to pattern advanced semiconductor chips, and is pioneering a new silicon crystallization tool for the display industry. Cymer's light sources have been widely adopted by the world's top chipmakers and the company's installed base comprises approximately 3,750 systems. Continuing its legacy of leadership, Cymer is currently pioneering the industry's transition to EUV lithography, the next viable step on the technology roadmap for the creation of smaller, faster chips. The company is headquartered in San Diego and supports its customers from numerous offices around the globe. Cymer maintains a Web site to which it regularly posts press releases, SEC filings, and additional information about Cymer. Interested persons can also subscribe to automated e-mail alerts or RSS feeds. For more information, please visit Cymer's website, Twitter, Facebook, LinkedIn and Google+ pages.

Forward Looking Statements

Statements in this press release that are not strictly historical in nature are forward-looking statements. These statements include, but are not limited to statements regarding the functionality and intended benefits of the company's focus drilling technology.  These statements are predictions based on current information and expectations and involve a number of risks and uncertainties. Actual events or results may differ materially from those projected in any of such statements due to various factors, including but not limited to: the risk that the company's focus drilling technology may not meet customer expectations or provide its intended benefits; the performance and market acceptance of the company's new products or technologies; new and enhanced product offerings by competitors; the demand for semiconductors in general, and, in particular, for leading-edge devices with smaller geometries; cyclicality in the market for semiconductor manufacturing equipment; the company's ability to meet its production and product development schedules; and the rate at which semiconductor manufacturers adopt new technologies.  For a discussion of these and other factors which may cause our actual events or results to differ from those projected, please refer to the company's most recent annual report on Form 10-K and quarterly reports on Form 10-Q, as well as other subsequent filings with the Securities and Exchange Commission (SEC). You are cautioned not to place undue reliance on these forward-looking statements, which speak only as of the date of this press release. All forward-looking statements are qualified in their entirety by this cautionary statement, and the company undertakes no obligation to revise or update any forward-looking statements to reflect events or circumstances after the date of this press release.

SOURCE Cymer, Inc.