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Pall Corporation Showcases Contamination Control and Water Reclamation Technologies for the Solar Energy Industry at Intersolar North America 2010

Purification, Filtration and Reclamation Products Reduce Solar Cell Manufacturing Costs


News provided by

Pall Microelectronics

Jun 28, 2010, 05:00 ET

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PORT WASHINGTON, N.Y., June 28 /PRNewswire-FirstCall/ -- Pall Corporation (NYSE: PLL), a global leader in filtration, separation and purification, will showcase economical and eco-friendly products and systems for the photovoltaic (PV) industry at Intersolar North America in San Francisco. The products are designed to help increase yield and reduce reworking times in solar cell manufacturing.

Purification of the process gases utilized in solar cell production has become critical to enhancing yields and conversion efficiency. Pall will feature two new media for its Gaskleen® purifier assemblies. The AresKleen™ HCLP media is highly effective in removing trace moisture down to < 15 parts per billion (ppb) levels from HCl gas used in the formation of trichlorosilane, a key ingredient in the production of polysilicon. Silane, also involved in making polysilicon as well as amorphous silicon PV cells, frequently contains trace siloxane and moisture. AresKleen SIP medium reduces these detrimental contaminants to sub-ppb levels. All Pall purifiers have integrated, highly efficient particle filters.

"The Pall GasKleen purifier with SIP material was evaluated by CVD Equipment Corporation and was found to lower dopant metal contaminants (As, P, Al and B) in a low grade silane line, resulting in improved silicon-epitaxial layers with impurities in the parts per trillion atomic (ppta) range," said Karlheinz Strobl, VP of business development, CVD Equipment Corporation. "We, therefore, find the Pall Purifier to be eminently capable of achieving below ppb levels of these contaminants in hydrogen, argon and silane process gases utilized in silane epitaxial film deposition."

Pall will present its fully automatic Water Reclaim System for recovering over 90% of deionized water used during silicon ingot shaping. The system efficiently and economically removes the resultant silicon fines without the need for chemical additives, providing essentially particle-free water for cost-effective recycling. A major supplier of shaping and grinding tools for the solar industry highly recommends this reclaim system.

Another exhibit will highlight Blowback Filtration Systems for the protection of CZ ingot puller vacuum pumps. A display of innovative filters and uniquely designed housings for chemical and water filtration will round out Pall's showcase at Intersolar. The systems and products provide long-term service without the interruption of frequent change-outs, increasing uptime and reducing maintenance costs for solar cell producers.

For more information, visit: www.pall.com/microe_46695.asp or www.pall.com/pdf/PV_Brochure_MEPVCAPENb-5.pdf .

Visit the Pall booth at Intersolar NA: #8326, West Hall, Moscone Center, San Francisco, July 13 - 15.

Pall Microelectronics supports the solar energy, semiconductor, data storage, fiber optic, display, solar and materials markets with a comprehensive suite of contamination control solutions for chemical, gas, water, chemical mechanical polishing (CMP) and photolithography processes.

About Pall Corporation

Pall Corporation (NYSE: PLL) is a filtration, separation and purification leader providing Total Fluid Management(SM) solutions to meet the critical needs of customers in biopharmaceutical; hospital, transfusion and veterinary medicine; energy and alternative energy; electronics; municipal and industrial water; aerospace; transportation and broad industrial markets. Together with our customers, we foster health, safety and environmentally responsible technologies. The company's engineered solutions enable process and product innovation and minimize emissions and waste. Pall Corporation, with total revenues of $2.3 billion for fiscal 2009, is an S&P 500 company with more than 10,000 employees serving customers worldwide. Pall has been named a top "green company" by Newsweek magazine.

SOURCE Pall Microelectronics

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