Reportlinker Adds ET-110 Nanolithography Equipment for IT, Electronics and Photonics - A Technology, Industry and Global Market Analysis

Jan 07, 2010, 12:43 ET from Reportlinker

NEW YORK, Jan. 7 /PRNewswire/ -- Reportlinker.com announces that a new market research report is available in its catalogue:

ET-110 Nanolithography Equipment for IT, Electronics and Photonics - A Technology, Industry and Global Market Analysis

http://www.reportlinker.com/p0170062/ET-110-Nanolithography-Equipment-for-IT-Electronics-and-Photonics---A-Technology-Industry-and-Global-Market-Analysis.html

REPORT SUMMARY

Nanofabrication equipment has been used to create integrated circuits in the 65nm to 45nm range, and companies are now moving to manufacturing computer chips and memory chips in the 32nm range.

In 2008, nanofabrication apparatus enabled semiconductor manufacturers to transform more than $11.4 billion worth of silicon wafer material into more than $425 billion worth of semiconductor, photonic, opto-electonic and MEMS material devices for use in computers and electronic devices, which in turn constituted a global market valued in excess of $1.38 trillion dollars, plus related services valued at $5 trillion dollars globally.

Semiconductor and electronics manufacturers spent roughly $80 billion in 2007 and $74 billion in 2008 for silicon wafers, materials and equipment which allowed them to manufacture integrated circuits at scales to 45nm, and they are now beginning to buy equipment to manufacture integrated circuits at the scales of 32nm and 22nm.

The overall market for wafers and nanofabrication equipment is expected to grow at nearly 10% a year for the next five years and grow from an estimated $65.8 billion in 2009 to $105.6 billion in 2014.

Companies involved in nanofabrication materials, apparatus, metrology and testing for the IT and electronics industry had sales in excess of $80.013 billion in 2007 and more than $73.558 billion in 2008, reflecting the worldwide economic downturn.

Research and development (R&D) spending for improved nanofabrication techniques and equipment exceeds $7 billion a year at the corporate level. Research and development of manufacturing equipment for 45nm technology for semiconductors, which began in 2003, is now the manufacturing standard, and the new standard under development is 32nm architecture, beginning to be implemented in 2009. Each reduction in size results in more powerful microprocessors, memory chips and silicon-based solar power collectors, in which creates new demands. Lithography, including masks and resist, and associated metrology currently comprises 30% to 40% of the entire cost of semiconductor manufacturing. This fraction depends strongly on the product mix, volume of integrated circuits in demand per design, and age of equipment in the factory.

The iRAP study identified over 200 companies and institutions involved in as manufacturers and developers as well as researchers. These companies are driving the technology to the next generation of nanofabrication in the semiconductor industry.

TABLE OF CONTENTS

INTRODUCTION I

STUDY GOAL AND OBJECTIVES II

REASONS FOR DOING THE STUDY III

CONTRIBUTIONS OF THE STUDY III

SCOPE AND FORMAT IV

METHODOLOGY V

INFORMATION SOURCES V

WHOM THE STUDY CATERS TO VI

AUTHOR'S CREDENTIALS VI

EXECUTIVE SUMMARY VIII

SUMMARY TABLE VALUE OF NONFABRICATION EQUIPMENT FOR SEMICONDUCTORS, THROUGH 2014 IX

SUMMARY FIGURE VALUE OF NANOFABRICATION EQUIPMENT FOR SEMICONDUCTORS, 2009-2014 IX

INDUSTRY OVERVIEW 1

TABLE 1 VALUE OF SEMICONDUCTOR NANOFABRICATION EQUIPMENT, THROUGH 2014 ($ BILLIONS) 3

FIGURE 1 VALUE OF NANOFABRICATION EQUIPMENT COMPONENTS USED IN SEMICONDUCTORS AND ELECTRONICS, 2009-2014 4

FIGURE 2 MARKET SHARES OF NANOFABRICATION TECHNIQUES, 2008 ($ BILLIONS) 5

TABLE 2 VALUE OF NANOFABRICATION INDUSTRY, 2008 AND 2007 6

FIGURE 3 NANOFABRICATION MARKET TIERS AND INDUSTRY SHARES, 2008 7

VALUE OF THE NANOFABRICATION INDUSTRY 8

TABLE 3 VALUE OF SEMICONDUCTOR EQUIPMENT AND MATERIALS, THROUGH 2014 ($ BILLIONS) 9

FIGURE 4 MARKET SHARES OF TOP TWENTY NANOFABRICATION EQUIPMENT COMPANIES, 2008 10

TABLE 4 VALUE OF THE NANOFABRICATION INDUSTRY'S TOP 20 COMPANIES 11

TABLE 5 VALUE OF NANOFABRICATION INDUSTRY COMPANIES RANKED 21-40 12

TABLE 6 VALUE OF NANOFABRICATION INDUSTRY COMPANIES, RANKED 41-68 13

TABLE 7 VALUE NANOFABRICATION INDUSTRY COMPANIES 14

TABLE 8 MAJOR PUBLIC SEMICONDUCTOR EQUIPMENT COMPANIES, 2009 15

MARKETS BY REGION 16

TABLE 9 VALUE OF SEMICONDUCTOR EQUIPMENT BY REGION, THROUGH 2014 ($ BILLIONS) 17

FIGURE 5 2009 SEMICONDUCTOR EQUIPMENT MARKET BY REGION 17

TABLE 10 SEMICONDUCTOR MATERIALS MARKET BY REGION, THROUGH 2014 ($ BILLIONS) 18

VALUE OF SILICON MATERIALS FOR THE SEMICONDUCTOR INDUSTRY 21

TABLE 11 VALUE OF SEMICONDUCTOR INDUSTRY SILICON WAFERS, THROUGH 2014 22

TABLE 12 MAJOR POLYSILICON PRODUCERS FOR THE SEMICONDUCTOR INDUSTRY 23

FIGURE 6 SEMICONDUCTOR MANUFACTURING FLOW CHART 25

NANO SEMICONDUCTOR MANUFACTURING METHODS 26

TABLE 13 GROWTH IN NANOFABRICATION METHODS, THROUGH 2014 ($ BILLIONS) 26

FIGURE 7 GROWTH IN NANOFABRICATION METHODS, 2009-2014 ($ BILLIONS) 27

TABLE 14 FOUNDRY COSTS FOR NANOFABRICATION OF 90-65NM, 45-32NM AND 22-12NM NODES 28

LITHOGRAPHY TECHNIQUES 28

TABLE 15 VALUE OF NANOLITHOGRAPHY PRODUCTS & METHODS, 2009-2014 29

TABLE 16 NANOLITHOGRAPHY APPLICATIONS 30

TABLE 17 LITHOGRAPHIC PROCESS STEPS 31

TABLE 18 LITHOGRAPHY TECHNOLOGY REQUIREMENTS - NEAR-TERM 32

NANOLITHOGRAPHY 36

TABLE 19 LITHOGRAPHY METHODS AND APPLICABLE NANOMETER NODES 36

PHOTOLITHOGRAPHY 37

TABLE 20 BASIC PHOTOLITHOGRAPHY PROCESS STEPS 38

STEPPER INDUSTRY STRUCTURE AND MARKET OUTLOOK 39

TABLE 21 STEPPER MANUFACTURERS 40

TABLE 21 STEPPER MANUFACTURERS (CONTINUED) 41

TABLE 22 STEPS FOR SINGLE METAL VERSION OF 35NM BASELINE RUN 43

TABLE 23 LITHOGRAPHY STEPS AND RELATED INFORMATION 44

TABLE 24 DOUBLE PATTERNING TECHNIQUES 50

EXTREME ULTRAVIOLET LITHOGRAPHY (EUVL) 52

FIGURE 8 EVALUATION OF A LIGHT SOURCE AT PHILIPS EXTREME UV 53

TABLE 25 SELECTED EUVL INNOVATIONS BY COMPANY 58

TABLE 25 SELECTED EUVL INNOVATIONS BY COMPANY (CONTINUED) 59

MASKLESS LITHOGRAPHY 61

FIGURE 9 ZONE-PLATE-ARRAY LITHOGRAPHY (ZPAL) 65

TABLE 26 MASKLESS LITHOGRAPHY MANUFACTURERS 66

TABLE 26 MASKLESS LITHOGRAPHY MANUFACTURERS (CONTINUED) 67

TABLE 26 MASKLESS LITHOGRAPHY MANUFACTURERS (CONTINUED) 68

IMPRINT LITHOGRAPHY 68

FIGURE 10 NANOINK'S NLP 2000 NANO LITHOGRAPHY PLATFORM 70

FIGURE 11 SEQUENCE FOR CREATING A RESIST MASK BY STEP-AND-STAMP NIL. 81

STRUCTURE OF THE IMPRINT INDUSTRY 83

TABLE 27 NANO-IMPRINT LITHOGRAPHY COMPANIES 83

TABLE 27 NANO-IMPRINT LITHOGRAPHY COMPANIES (CONTINUED) 84

TABLE 27 NANO-IMPRINT LITHOGRAPHY COMPANIES (CONTINUED) 85

APPLICATIONS: NANO-IMPRINT 85

TABLE 28 NANO-IMPRINT APPLICATIONS 86

FIGURE 12 NIL TECHNOLOGY QUARTZ AND SILICON STANDARD STAMPS WITH LINEWIDTHS DOWN TO 50NM 87

MASK MAKING 92

TABLE 29 COMMON MASK TYPES 93

TABLE 30 LIST OF THE LITHOGRAPHY STEPS AND THE ASSIGNED MASKS UP TO THE FIRST METAL LAYER 94

MASK INDUSTRY STRUCTURE 95

TABLE 31 LITHOGRAPHY MASK INDUSTRY ORGANIZATIONS 96

TABLE 31 LITHOGRAPHY MASK INDUSTRY ORGANIZATIONS (CONTINUED) 97

TABLE 31 LITHOGRAPHY MASK INDUSTRY ORGANIZATIONS (CONTINUED) 98

TABLE 31 LITHOGRAPHY MASK INDUSTRY ORGANIZATIONS (CONTINUED) 99

TABLE 31 LITHOGRAPHY MASK INDUSTRY ORGANIZATIONS (CONTINUED) 100

FIGURE 13 MAKING A MASK FOR NANOLITHOGRAPHY STEPS 1-6 102

DOUBLE PATTERNING 104

COST OF LITHOGRAPHY 106

LITHOGRAPHY TECHNOLOGY CHALLENGES 108

TABLE 32 LITHOGRAPHY CHALLENGES 109

TABLE 32 LITHOGRAPHY CHALLENGES (CONTINUED) 110

BEAM METHODS/LIGHT SOURCES 111

TABLE 33 VALUE BEAM PRODUCTS & METHODS, THROUGH 2014 ($ MILLIONS) 112

TABLE 34 LIGHT SOURCE MARKET SHARES, 2009 COMPARED TO 2014 113

FIGURE 14 LIGHT SOURCE MARKET SHARES, 2009 COMPARED TO 2014 113

TABLE 35 WAVELENGTHS OF EXCIMER LASERS 116

TABLE 36 UV AND EUV BEAM MANUFACTURERS AND SALES VALUE, 2008 ($ BILLIONS) 121

TABLE 36 UV AND EUV BEAM MANUFACTURERS AND SALES VALUE, 2008 ($ BILLIONS) CONTINUED 122

TABLE 36 UV AND EUV BEAM MANUFACTURERS AND SALES VALUE, 2008 ($ BILLIONS) CONTINUED 123

TABLE 36 UV AND EUV BEAM MANUFACTURERS AND SALES VALUE, 2008 ($ BILLIONS) CONTINUED 124

TABLE 36 UV AND EUV BEAM MANUFACTURERS AND SALES VALUE, 2008 ($ BILLIONS) CONTINUED 125

RECENT DEVELOPMENTS 127

NANOLITHOGRAPHY SEMICONDUCTOR AND ELECTRONICS MARKET APPLICATIONS 136

TABLE 37 REVENUE FOR PRODUCTS MANUFACTURED BY LITHOGRAPHIC PROCESSES, THROUGH 2014 ($ BILLIONS) 136

FIGURE 15 MARKET APPLICATIONS FOR NANOLITHOGRAPHY, 2008 137

TABLE 38 TOP 10 MARKET APPLICATIONS FOR LITHOGRAPHIC TECHNIQUES, 2008 138

FIGURE 16 VALUE OF PRODUCTS MANUFACTURED BY LITHOGRAPHIC TECHNIQUES, 2008 139

SEMICONDUCTORS 141

TABLE 39 SEMICONDUCTOR MARKET VALUE 2008 141

FIGURE 17 2008 REVENUE FOR SEMICONDUCTORS CREATED BY LITHOGRAPHIC TECHNIQUES 142

FIGURE 18 LITHOGRAPHIC SEMICONDUCTOR MARKET APPLICATIONS 2009 143

TABLE 40 MAJOR APPLICATIONS OF SEMICONDUCTORS 144

TABLE 40 MAJOR APPLICATIONS OF SEMICONDUCTORS (CONTINUED) 145

SEMICONDUCTOR SALES BY REGION 146

FIGURE 19 SEMICONDUCTOR SALES BY REGION, JANUARY 2009 146

TABLE 41 THREE-MONTH AVERAGE SEMICONDUCTOR SALES FOR JANUARY BY YEAR ($) 147

MEMORY 147

TABLE 42 DRAM MANUFACTURER MARKET SHARES, 2008 149

TABLE 43 MAJOR FLASH MEMORY MANUFACTURERS 151

ASICS 152

TABLE 44 MAJOR ASIC SUPPLIERS 153

MICROPROCESSORS AND CENTRAL PROCESSING UNITS 153

TABLE 45 MICROPROCESSOR CONTROLLER COMPANIES 153

TABLE 45 MICROPROCESSOR CONTROLLER COMPANIES (CONTINUED) 154

TABLE 46 MAJOR CENTRAL PROCESSING UNIT (CPU) MANUFACTURERS, 2009 155

HARD DISK DRIVES 155

TABLE 47 VALUE OF THE HARD DISK MARKET, 2009-2014 ($ BILLIONS) 156

TABLE 48 LEADING HARD DRIVE MANUFACTURERS 159

SOLID STATE DRIVES 160

TABLE 49 SOLID STATE STORAGE COMPANIES 161

TABLE 50 LEADING SSD COMPANIES 2009 163

TABLE 50 LEADING SSD COMPANIES 2009 (CONTINUED) 164

TABLE 51 RADIO FREQUENCY APPLICATIONS AND LITHOGRAPHIC MANUFACTURING TECHNIQUES 167

TABLE 52 VALUE OF RADIO FREQUENCY SEMICONDUCTORS, THROUGH 2014 ($ BILLIONS) 168

TABLE 53 RADIO FREQUENCY (WIRELESS) APPLICATIONS AND LITHOGRAPHY 169

TABLE 54 LEADING WIRELESS TECHNOLOGY COMPANIES AND 171

LITHOGRAPHY TECHNIQUES 171

TABLE 55 PRINTED CIRCUIT BOARD MARKET VALUE, THROUGH 2014 ($ BILLIONS) 172

TABLE 56 PRINTED CIRCUIT BOARD MANUFACTURERS 173

TABLE 57 2009 CAPITAL EXPENDITURES BY MAJOR SEMICONDUCTOR MANUFACTURER 174

TABLE 57 2009 CAPITAL EXPENDITURES BY MAJOR SEMICONDUCTOR MANUFACTURER (CONTINUED) 175

TABLE 57 2009 CAPITAL EXPENDITURES BY MAJOR SEMICONDUCTOR MANUFACTURER (CONTINUED) 176

TABLE 57 2009 CAPITAL EXPENDITURES BY MAJOR SEMICONDUCTOR MANUFACTURER (CONTINUED) 177

TABLE 58 OTHER SEMICONDUCTOR MANUFACTURERS EMPLOYING LITHOGRAPHIC TECHNOLOGY 178

TABLE 58 OTHER SEMICONDUCTOR MANUFACTURERS EMPLOYING LITHOGRAPHIC TECHNOLOGY (CONTINUED) 179

TABLE 59 RECENT START-UP COMPANIES 180

TABLE 60 NANOTECHNOLOGY ENABLED COMMON IT CONSUMER PRODUCTS 181

PHOTONICS, OPTO-ELECTRONICS, OPTICS AND LITHOGRAPHY 183

TABLE 61 VALUE OF PHOTONICS, PHOTONIC MANUFACTURING EQUIPMENT AND PHOTONIC MATERIALS, 2009-1014 183

FIGURE 20 APPLICATIONS FOR LITHOGRAPHIC MANUFACTURING METHODS IN THE PHOTONICS INDUSTRY 184

TABLE 62 VALUE OF LITHOGRAPHICALLY PRODUCED PHONTONIC AND MEMS PRODUCTS AND COMPONENTS, THROUGH 2014 ($ BILLIONS) 185

FIGURE 21 PHOTONIC COMPONENTS VALUES, 2009-2014 CAGR 186

TABLE 63 2009 VALUE OF PHOTONIC AND OPTOELECTRONIC APPLICATIONS 188

PHOTONIC AND OPTO-ELECTRONIC COMPONENTS 189

TABLE 64 VALUE OF OPTO-ELECTRONIC AND PHOTONIC COMPONENTS, THROUGH 2014 ($ BILLIONS) 189

TABLE 65 OPTO-ELECTRONIC COMPONENTS MANUFACTURED 191

BY LITHOGRAPHIC METHODS 191

TABLE 66 COMPANIES, PHOTONIC DEVICES AND LITHOGRAPHIC METHODS 194

TABLE 66 COMPANIES, PHOTONIC DEVICES AND LITHOGRAPHIC METHODS (CONTINUED) 195

TABLE 67 COMPANIES AND ORGANIZATIONS INVOLVED IN DEVELOPING PHOTONICS 196

TABLE 67 COMPANIES AND ORGANIZATIONS INVOLVED IN DEVELOPING PHOTONICS (CONTINUED) 197

TABLE 67 COMPANIES AND ORGANIZATIONS INVOLVED IN DEVELOPING PHOTONICS (CONTINUED) 198

TABLE 67 COMPANIES AND ORGANIZATIONS INVOLVED IN DEVELOPING PHOTONICS (CONTINUED) 199

FIGURE 22 INTEL HYBRID SILICON LASER 203

TABLE 68 PHOTONIC MATERIALS AND LITHOGRAPHIC METHODS 206

TELECOM MARKET 206

FIGURE 23 OPTICAL EQUIPMENT FOR THE TELECOM MARKET, 2009-2014 207

TABLE 69 VALUE OF OPTO-ELECTRONIC AND PHOTONIC COMPONENTS FOR THE TELECOM MARKET 2009-2014 CAGR% ($ BILLIONS) 208

TABLE 70 TELECOM NETWORK AND COMPONENT MANUFACTURERS 208

TABLE 70 TELECOM NETWORK AND COMPONENT MANUFACTURERS (CONTINUED) 209

DISPLAY MARKET 209

TABLE 71 VALUE OF DISPLAY TECHNOLOGIES MANUFACTURED BY LITHOGRAPHIC METHODS, THROUGH 2014 ($ BILLIONS) 210

FIGURE 24 VALUE OF DISPLAY TECHNOLOGY, 2009-2014 211

TABLE 72 PLASMA PANEL COMPANY MARKET SHARE, 2008 213

TABLE 73 PLASMA DISPLAY MANUFACTURERS AND LITHOGRAPHIC TECHNIQUES 214

TABLE 74 TOP LCD MANUFACTURERS, 2009 216

TABLE 75 LCD MANUFACTURERS AND LITHOGRAPHY 217

TABLE 76 VALUE OF LED MARKET, THROUGH 2014 ($ BILLIONS) 219

TABLE 77 VALUE OF LED APPLICATIONS, THROUGH 2014 ($ MILLIONS) 220

TABLE 78 COMPANIES, LIGHT-EMITTING DEVICES AND LITHOGRAPHY 222

TABLE 78 COMPANIES, LIGHT-EMITTING DEVICES AND LITHOGRAPHY (CONTINUED) 223

TABLE 79 LED MANUFACTURERS 224

TABLE 79 LED MANUFACTURERS (CONTINUED) 225

TABLE 80 VALUE OF THE GLOBAL ILLUMINATION MARKET, 2009 226

TABLE 81 REGIONAL MARKETS FOR ILLUMINATION, 2009 226

SOLAR POWER 227

TABLE 82 VALUE OF THE SOLAR POWER MARKET, 2009-2014 229

TABLE 83 TOP NATIONAL PV INSTALLATIONS BY MEGAWATT, 2008 231

TABLE 84 LEADING SOLAR POWER PANEL MANUFACTURERS 233

TABLE 85 SOLAR POWER AND LITHOGRAPHY 234

TABLE 85 SOLAR POWER AND LITHOGRAPHY (CONTINUED) 235

SENSORS 235

TABLE 86 SENSOR APPLICATION MARKETS 2009 236

TABLE 87 SENSOR VALUE BY APPLICATION, THROUGH 2014 ($ BILLIONS) 237

TABLE 88 COMPANIES, SENSOR PRODUCTS AND LITHOGRAPHY 238

MICRO ELECTROMECHANICAL SYSTEMS (MEMS) 239

TABLE 89 VALUE OF MEMS EQUIPMENT AND MATERIALS MARKET, THROUGH 2014 ($ MILLIONS) 240

TABLE 90 MEMS MANUFACTURING EQUIPMENT & MATERIALS, THROUGH 2014 ($ MILLIONS) 240

TABLE 91 MARKET SHARES OF EQUIPMENT FOR MEMS FABRICATION, 2009 ($ MILLIONS) 241

FIGURE 25 MARKET SHARES OF EQUIPMENT FOR MEMS FABRICATION 242

TABLE 92 VALUE OF MEMS MATERIALS MARKET, THROUGH 2014 ($ MILLIONS) 242

TABLE 93 VALUE OF MEMS MATERIALS MARKET, 2009 243

FIGURE 26 MARKET SHARES OF MATERIALS FOR MEMS FABRICATION 243

TABLE 94 MEMS APPLICATIONS AND MARKETS, 2009 244

FIGURE 27 2009 MEMS APPLICATIONS 245

TABLE 95 VALUE OF MEMS DEVICES AND MEMS-BASED SYSTEMS AND PRODUCTS, THROUGH 2014 ($ BILLIONS) 246

TABLE 96 MEMS MANUFACTURING AND LITHOGRAPHY 248

TABLE 96 MEMS MANUFACTURING AND LITHOGRAPHY (CONTINUED) 249

TABLE 97 MAJOR MEMS MANUFACTURERS, 2009 250

OTHER PHOTONICS 250

TABLE 98 OTHER PHOTONIC APPLICATIONS USING LITHOGRAPHIC APPARATUS, THROUGH 2014 ($ BILLIONS) 250

TABLE 99 COMPANIES, MEDICAL PHOTONIC APPLICATIONS AND LITHOGRAPHIC METHODS 252

TABLE 100 EXAMPLES OF OPTICAL PRODUCTS FOR SEMICONDUCTORS/LCD LITHOGRAPHY EQUIPMENT 254

PATENT ANALYSIS 256

TABLE 101 PATENT APPLICATIONS APRIL 19, 2001-FEBRUARY 5, 2009 256

TABLE 102 U.S. PATENTS BY NATION 257

TABLE 103 U.S. NANO PATENTS BY YEAR, 2000-2008 258

FIGURE 28 U.S. NANO-PATENTS BY YEAR 2000-2008 258

TABLE 104 U.S. NANO PATENTS BY YEAR, 1999 & PRIOR THROUGH 2008 259

TABLE 105 U.S. NANO PATENTS BY INVENTORS AND THEIR STATES THROUGH FEBRUARY 5, 2009 260

TABLE 106 U.S. NANO PATENTS BY ASSIGNEES AND THEIR STATES THROUGH FEBRUARY 5, 2009 261

TABLE 107 LITHOGRAPHY PATENTS AND APPLICATIONS BY ORGANIZATION 262

TABLE 108 50 RECENT LITHOGRAPHY PATENTS, FEB.24, 2009-NOV 11, 2008 263

TABLE 108 50 RECENT LITHOGRAPHY PATENTS, FEB.24, 2009-NOV 11, 2008 (CONTINUED) 264

TABLE 108 50 RECENT LITHOGRAPHY PATENTS, FEB.24, 2009-NOV 11, 2008 (CONTINUED) 265

TABLE 109 50 RECENT LITHOGRAPHIC PATENTS, FEB. 24, 2009 -DEC.9, 2008 265

TABLE 109 50 RECENT LITHOGRAPHIC PATENTS, FEB. 24, 2009 -DEC.9, 2008 (CONTINUED) 266

TABLE 109 50 RECENT LITHOGRAPHIC PATENTS, FEB. 24, 2009 -DEC.9, 2008 (CONTINUED) 267

TABLE 110 50 RECENT LITHOGRAPHY PATENT APPLICATIONS, FEB. 19, 2009-DEC. 18, 2008 268

TABLE 110 50 RECENT LITHOGRAPHY PATENT APPLICATIONS, FEB. 19, 2009-DEC. 18, 2008 (CONTINUED) 269

TABLE 110 50 RECENT LITHOGRAPHY PATENT APPLICATIONS, FEB. 19, 2009-DEC. 18, 2008 (CONTINUED) 270

TABLE 111 LITHOGRAPHIC PATENT APPLICATIONS, FEB. 19, 2009-DEC. 18, 2008 271

TABLE 111 LITHOGRAPHIC PATENT APPLICATIONS, FEB. 19, 2009-DEC. 18, 2008 (CONTINUED) 272

NANOLITHOGRAPHY PROFILES 273

4D TECHNOLOGY CORPORATION 273

ABEAM TECHNOLOGIES, INC. 273

ADVANCED SEMICONDUCTOR ENGINEERING (ASE) GROUP 274

ADVANCE NANOTECH, INC 275

ADVANTEST CORPORATION 276

AGILENT TECHNOLOGIES 276

AIXTRON AG 277

AMTECH SYSTEMS, INC. 278

AMETEK 278

AMETEK-ATOMIKA/ CAMECA, 279

ANCHOR SEMICONDUCTOR INC. 280

ANTARIA LIMITED/ADVANCED NANOTECHNOLOGY LIMITED 280

API NANOTRONICS 281

APPLIED MATERIALS, INC. 282

ARRADIANCE INC. 284

ARROWHEAD RESEARCH CORP./UNIDYM 284

ASAHI GLASS CO. 286

ASML 287

TABLE 112 CURRENT ASML LITHOGRAPHY PRODUCT PORTFOLIO OF STEPPERS AND STEP & SCAN SYSTEMS 288

ASYST TECHNOLOGIES, INC. 289

ATMI, INC 290

AVIZA TECHNOLOGY, INC. 290

AXCELIS TECHNOLOGIES, INC. 290

BIOSENSIA 291

BREWER SCIENCE INC 291

BRION TECHNOLOGIES 292

BROOKS AUTOMATION, INC. 293

CANON ANELVA CORPORATION 293

CEA-LETI 294

CHA INDUSTRIES 295

COGNEX CORPORATION 296

COHU 296

COORSTEK JAPAN 297

CRESTEC CORPORATION 297

CUBIC WAFER, INC. 297

CVD EQUIPMENT CORPORATION 298

CVI MELLES GRIOT 299

CYANTEK CORP. 300

CYMER, INC. 300

DEEP PHOTONICS CORP. 301

DIRECT2SILICON (D2S) 302

DOW CORNING CORP. 302

ELIONIX, INC. 303

ELECTROGLAS, INC. 303

ENERGETIQ TECHNOLOGY, INC. 304

FIGURE 29 ENERGETIQ EQ-10HR 304

ENTHONE GMBH 304

EUV LITHO INC 305

EV GROUP (EVG) 305

EXFO ELECTRO-OPTICAL ENGINEERING, INC. (EXFO) 306

FEI COMPANY 307

FIBICS INCORPORATED 308

FREESCALE SEMICONDUCTOR, INC. 308

FUJITSU LIMITED 310

FIGURE 30 FUJITSU 2008 REVENUES BY SEGMENT 310

GESTION UNIVALOR, L.P. 311

GIGAPHOTON, INC. 311

FIGURE 31 GIGAPHOTON MARKET SALES 312

HAKUTO CO., LTD. 313

HAMATECH APE (SINGULUS GROUP) 313

HEADWATERS NANOKINETIX, INC. 314

HEIDELBERG INSTRUMENTS MIKROTECHNIK GMBH 314

HEMLOCK SEMICONDUCTOR CORPORATION 315

HITACHI KOKUSAI ELECTRIC, INC. 316

HITACHI HIGH TECHNOLOGIES AMERICA 316

HOLON CO., LTD. 317

HORIBA, LTD. 317

HONEYWELL ELECTRONIC MATERIALS 318

IBM 318

IBM ALLIANCE 319

IMEC 320

IMPATTERN SOLUTIONS 323

IMS NANOFABRICATION 323

INTEGRAN TECHNOLOGIES 324

INTEL CORPORATION (INTEL) 325

INTEVAC 326

ION BEAM SERVICES 326

ISHII TOOL & ENGINEERING CORPORATION 327

JAPAN LASER CORPORATION 327

JAPAN ELECTRONIC MATERIAL CORPORATION 328

KANEMATSU CORPORATION 328

KLA-TENCOR CORPORATION 329

KOTURA, INC. 330

KULICKE AND SOFFA INDUSTRIES, INC. 331

KURT J. LESKER COMPANY 331

LAM RESEARCH CORPORATION 332

LITHO TECH JAPAN CORPORATION 333

LOT-ORIEL GROUP 333

LTX-CREDENCE CORPORATION 334

LUMARRAY 334

LUMINESCENT TECHNOLOGIES, INC. 335

MATTSON TECHNOLOGY, INC. 336

MEDIA LARIO TECHNOLOGIES S.R.L. 337

MENTOR GRAPHICS, INC 337

MICRONIC LASER SYSTEMS AB 338

MICRO LITHOGRAPHY INC. (MLI) 339

MICRO RESIST TECHNOLOGY GMBH 339

MKS INSTRUMENTS, INC. 339

MOLECULAR MANUFACTURING ENTERPRISES, INC. 340

MOLECULAR IMPRINTS, INC. 340

FIGURE 32 MOLECULAR IMPRINTS NIL APPARATUS 342

MONODRIVE, INC. 343

N&K TECHNOLOGY, INC. 344

NANOCHIP 344

NANO CLUSTER DEVICES LIMITED 345

NANOGATE AG 345

NANOIDENT AG 346

FIGURE 33 WORLD'S FIRST PRINTED LAB-ON-A-CHIP SENSOR BY NANOIDENT 347

NANOINK, INC. 348

NANOLAB 348

NANOLANE 349

NANO-MASTER, INC. 349

NANOMATERIALS DISCOVERY CORPORATION (NCD) 350

NANOMETER STORAGE CORPORATION 350

NANOMETRICS INC. 351

NANOMIX, INC. 351

NANONEX CORPORATION 352

NANONICS IMAGING LTD. 353

FIGURE 34 BSA PROTEIN NANOPRINTING 354

NANO SYSTEM SOLUTIONS, INC. 354

NANOPLUS GMBH 355

NANO-TERRA, INC. 356

NANO-UV 357

NAPA (EMERGING NANOPATTERNING METHODS) CONSORTIUM 357

TABLE 113 NAPA CONSORTIUM MEMBERS, 2009 358

TABLE 113 NAPA CONSORTIUM MEMBERS, 2009 (CONTINUED) 359

NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY 359

NEXX SYSTEMS 360

NIKON CORPORATION 361

FIGURE 35 NIKON STEPPERS AND SCANNERS 363

NIL TECHNOLOGY APS 364

NISSIN ELECTRIC CO., LTD. 364

NOVA MEASURING INSTRUMENTS LTD. 365

NOVELLUS SYSTEMS, INC. 365

NUMERICAL TECHNOLOGIES 367

OBDUCAT 368

OERLIKON 369

OPTNICS PRECISION (OPT) 369

ORBOTECH LTD. 370

ORSAY PHYSICS S.A. 370

OXFORD INSTRUMENTS 370

PALL CORPORATION 371

PARTICLE MEASURING SYSTEMS, INC. 372

PDF SOLUTIONS, INC. 372

PHILIPS EXTREME UV 373

PYXIS TECHNOLOGY 373

QUNANO AB 374

QUANTUM WAVE TECHNOLOGIES 374

RAITH GMBH 375

RAVE LLC 376

RAYMOR INDUSTRIES INC. 377

RAYTEX CORPORATION 377

REMARKABLE MASK TECHNOLOGY CO. LTD. 378

NO. 7 DAI SHUN STREET, TAI PO INDUSTRIAL ESTATE, TAI PO, NEW TERRITORIES, HONG KONG 378

REPLISAURUS TECHNOLOGIES 378

FIGURE 36 REPLISAURUS ELECTROCHEMICAL PATTERN REPLICATION 379

RF NANO CORPORATION 379

ROHM AND HAAS ELECTRONIC MATERIALS 380

RUDOLPH TECHNOLOGIES, INC. 380

SAMSUNG 381

SAMSUNG ELECTRO-MECHANICS CO., LTD. 381

SCHOTT LITHOTEC, DIVISION OF SCHOTT AG 382

SEKI TECHNOTRON CORPORATION 382

SEMATECH 383

SEMITOOL, INC. 384

SEMPRIUS 384

S. E. S. CO., LTD. 385

S.E.T. (SMART EQUIPMENT TECHNOLOGY) 385

SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD. 386

SILICON LIGHT MACHINES 386

SOKUDO CO., LTD. 387

SOLID STATE EQUIPMENT CORPORATION 387

SONIX, INC 388

SUSS MICROTEC LITHOGRAPHY GMBH 388

SYNOPSYS, INC. 389

TAIWAN SEMICONDUCTOR MFG. CO. LTD. (TSMC) 390

TABLE 114 MAJOR INDEPENDENT FOUNDRIES/LITHOGRAPHY CUSTOMERS 391

TAKUMI TECHNOLOGY CORPORATION 391

TELA INNOVATIONS 392

TECHNO ALPHA CO., LTD. 393

TEGAL CORPORATION 393

TESSERA 395

TOUMAZ TECHNOLOGY LIMITED/NANOSCIENCE TECHNOLOGIES, INC. 395

TOKYO ELECTRON LIMITED 396

TABLE 115 JAPANESE NANOFABRICATION COMPANIES FOR THE SEMICONDUCTOR INDUSTRY 397

TRANSFER DEVICES, INC. 397

TOPPAN PHOTOMASKS, INC. (TOPPAN PRINTING) 398

TOWA CORPORATION 400

ULTRATECH, INC. 400

VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. 401

VERIGY LTD. 401

VISTEC SEMICONDUCTOR SYSTEMS, INC. 402

VTT MICROELECTRONIC CENTER 403

WACOM QUARTZ CORPORATION 404

XEI SCIENTIFIC, INC. 404

XLITH 405

XRADIA INC 405

XYALIS 406

ZETTACORE, INC. 406

ZYGO CORPORATION 407

ZYVEX TECHNOLOGIES 407

COMPANIES AND INSTITUTIONS WITH NANOLITHOGRAPHY RESEARCH PROJECTS 409

ALCES TECHNOLOGY, INC. 409

ARIZONA STATE UNIVERSITY 410

BOSTON COLLEGE 411

CORNELL UNIVERSITY 412

EM PHOTONICS, INC. 413

FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS 413

HARVARD UNIVERSITY 415

INPHASE TECHNOLOGIES 416

KAPTEYN-MURNANE LABS INC 417

LAWRENCE BERKELEY NATIONAL LABORATORY 417

LUCENT TECHNOLOGIES 418

MASSACHUSETTS INSTITUTE OF TECHNOLOGY 419

NORTH CAROLINA AGRICULTURAL & TECHNICAL STATE UNIVERSITY 420

NORTHWESTERN UNIVERSITY 421

OPTICAL RESEARCH ASSOCIATES 422

OREGON STATE UNIVERSITY 423

PHOTONTECH, LLC 424

SCIENCE RESEARCH LABORATORY, INC. 424

SEMICONDUCTOR LEADING EDGE TECHNOLOGIES, INC. (SELETE) 425

SMALL BUSINESS INNOVATION RESEARCH, NSF 426

SOUTHERN ILLINOIS UNIVERSITY AT CARBONDALE 426

STANFORD UNIVERSITY 427

STATE UNIVERSITY OF NEW YORK (SUNY) AT BUFFALO 428

UNITED STATES NAVAL ACADEMY 428

UNIVERSITAT AUTONOMA DE BARCELONA (UAB) 429

UNIVERSITY OF CALIFORNIA-DAVIS 430

UNIVERSITY OF CALIFORNIA-BERKELEY 431

UNIVERSITY OF CALIFORNIA-RIVERSIDE OFFICE OF RESEARCH 433

UNIVERSITY OF CENTRAL FLORIDA 434

UNIVERSITY OF COLORADO AT BOULDER 435

UNIVERSITY OF FLORIDA 436

UNIVERSITY OF KANSAS CENTER FOR RESEARCH, INC. 438

UNIVERSITY OF MASSACHUSETTS, LOWELL 438

UNIVERSITY OF MICHIGAN, ANN ARBOR 439

UNIVERSITY OF NORTH CAROLINA AT CHARLOTTE 440

UNIVERSITY OF PENNSYLVANIA RESEARCH SERVICES 441

UNIVERSITY OF VERMONT 442

UNIVERSITY OF WISCONSIN-MADISON 442

ZENWA INC 443

OTHER NANOLITHOGRAPHY RESEARCH PROJECTS 444

TABLE 116 OTHER NANOLITHOGRAPHY RESEARCH PROJECTS 444

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Nanotechnology Industry: ET-110 Nanolithography Equipment for IT, Electronics and Photonics - A Technology, Industry and Global Market Analysis

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