Axcelis Announces Multi System 'Purion XE' Orders From Several Chipmakers In China

Driven by Dynamic Growth in 3D NAND and Custom Planar Logic

Mar 08, 2016, 08:00 ET from Axcelis Technologies, Inc.

BEVERLY, Mass., March 8, 2016 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced that it has received multiple system orders from several leading chipmakers in China for the Purion XE™ high energy implanter. The systems will be used to support the design and volume production of both 3D NAND Flash and custom planar logic devices in multiple fabs across China. The systems are scheduled to ship in the first quarter. 

Executive Vice President, Customer Operations John Aldeborgh said, "We are very excited to support the rapid growth of the 3D NAND Flash market in China. As data storage solutions and mobile devices proliferate, the market for cost efficient and reliable 3D NAND Flash memory devices is expected to grow considerably, with a double digit annual growth rate. We see significant opportunity for the Purion XE because of its ability to provide the most precise dopant placement, including exacting angle control, which is critical to ensure high levels of performance and yield in these processes."

The Purion Platform The Purion platform redefines the ion implanter application space, delivering unmatched purity, precision and productivity to enhance customers' device performance and yield. On this platform, Axcelis has built the industry's first complete implant product solution designed specifically for advanced planar and 3D devices while providing the most flexible and productive manufacturing capability. This cross-product platform architecture is designed to drive manufacturing flexibility and lower the total cost of fab operations. All Purion implanters incorporate Axcelis' industry leading Purion Contamination Shield™ Defense System, for unsurpassed implant quality, so even the most sensitive devices can realize optimized device performance. The platform's proprietary Purion Vector™ dose and angle control system, and constant focal length scanning deliver the most precise and repeatable dopant placement available today. The platform's superior beam current performance combined with the Purion™ 500wph end station provides the industry's highest productivity. The Purion platform includes the Purion M™ medium current implanter, the Purion H™ high current implanter, and the Purion XE high energy implanter.

About Axcelis: Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at


Maureen Hart (editorial/media) 978.787.4266 Doug Lawson (investor relations) 978.787.9552

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SOURCE Axcelis Technologies, Inc.