Axcelis Optima HDx High Current Implanter Achieves New Industry Milestone In Source Life Performance

Eterna ELS3 Source and Innovative Gas Delivery System Combine to Provide >500 Hours of Source Life for Powerful COO Advantage

Jul 24, 2012, 08:00 ET from Axcelis Technologies, Inc.

BEVERLY, Mass., July 24, 2012 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that its Optima HDx high current implanter has achieved a new industry milestone in source life performance, by delivering over 500 hours of source life for carbon and germanium species independently.  The system combines revolutionary ion source technology, the Eterna ELS3, with SPECTRA Solifex, an innovative, new gas delivery system designed for Axcelis by The Linde Group's Gases Division.  Together, these technologies significantly extend source life for carbon and germanium applications, providing chipmakers increased system availability, higher overall productivity, and lower cost of consumables; all translating to a compelling cost of ownership advantage.

"We're pleased to be able to offer customers this cost of ownership advantage, which reduces the annual operating cost of the fab," said Bill Bintz, Executive Vice President of Product Development, Engineering and Marketing. "Our Eterna ELS3 source, supported by the Linde SPECTRA Solifex gas delivery system, is already in the field with leading logic and memory customers and they are experiencing remarkable performance results. We partnered with Linde because of their expertise to develop, deliver and support this new technology in the field. We look forward to working with them on additional performance enhancements in the future."

With the Eterna ELS3, Axcelis has leveraged its ion source technology expertise to deliver the industry's next generation in source performance for the sub 2Xnm node. The Eterna ELS3 includes patent pending hardware and process improvements designed to extend source life by an unprecedented 500% improvement for Carbon, and a 500% improvement for Germanium applications. The system is available as an option on new Optima HDx tools, as well as an upgrade to installed systems.

The new gas delivery system, SPECTRA Solifex, was selected because of its ability to maximize productivity and provide meaningful cost of capital savings. SPECTRA Solifex increases system productivity for specialty gases by delivering higher uptime, extended source life performance, and reduced consumables and preventative maintenance costs. These benefits result in high overall system productivity and fewer tools required in the manufacturing process. The compact, cost effective design combines both source and co-gas in a single cylinder, minimizing space requirements and simplifying maintenance.

The Optima HDx high current implanter provides solutions for device manufacturers highest dose requirements with the versatility and extendibility to provide solutions beyond today's 2Xnm technology node. For more information on the innovative Optima HDx and our complete line of ion implantation systems, please visit

Axcelis Technologies, Inc. (Nasdaq: ACLS), headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation and cleaning systems. For more information, visit the company's website at:

The Linde Group

The Linde Group is a world-leading gases and engineering company with around 50,500 employees in more than 100 countries worldwide. In the 2011 financial year, it achieved sales of EUR 13.787 bn. The strategy of The Linde Group is geared towards long-term profitable growth and focuses on the expansion of its international business with forward-looking products and services. Linde acts responsibly towards its shareholders, business partners, employees, society and the environment – in every one of its business areas, regions and locations across the globe. Linde is committed to technologies and products that unite the goals of customer value and sustainable development. For more information, visit the website at or


Axcelis Technologies: Maureen Hart (editorial/media) 978.787.4266 Jay Zager (financial community) 978.787.9408

The Linde Group: Richard Czepukojc, Paul Mittonette, Greg Shuttleworth, 

SOURCE Axcelis Technologies, Inc.