Axcelis Penetrates New Customer With 'Purion H' High Current Implanter

Chipmaker Selected Purion H to Leverage Axcelis' Innovative Spot Beam Technology for Advanced Memory Device Manufacturing

Jul 13, 2015, 08:00 ET from Axcelis Technologies, Inc.

BEVERLY, Mass., July 13, 2015 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced today that it has penetrated a new customer with the Purion H™ high current implanter. This is the fourth chipmaker to select the Purion H. The Purion H will be used to develop and manufacture advanced memory devices. The system is scheduled to ship in the third quarter.

John Aldeborgh, executive vice president, customer operations, commented, "This is a significant win for Axcelis. This selection is further evidence of the competitiveness of the Purion H. The Purion platform was specifically designed to address the industry's most challenging technical and economic requirements for advanced planar and emerging 3D devices."

Bill Bintz, executive vice president, engineering and marketing, noted, "The memory market is currently the most capital intensive segment for ion implant. Continuing to expand our customer footprint in this segment is a key objective of our Purion strategy."

The Power of Purion The Purion platform redefines the ion implanter application space, delivering unmatched purity, precision and productivity to enhance customers' device performance and yield.   On this platform, Axcelis has built the industry's first complete implant product solution designed specifically for advanced planar and 3D devices while providing the most flexible and productive manufacturing capability for our customers. The systems' common cross-product platform architecture is designed to drive manufacturing flexibility and lower the total cost of fab operations. All Purion implanters incorporate Axcelis' industry leading Purion Contamination Shield™ Defense System, for unsurpassed implant quality, so even the most sensitive devices can realize optimized device performance.  The platform's proprietary Purion Vector™ dose and angle control system, and constant focal length scanning deliver the most precise and repeatable dopant placement available today.   The platform's superior beam current performance combined with the Purion™ 500wph end station provides the industry's highest productivity. The Purion platform includes the Purion M™ medium current implanter, the Purion H™ high current implanter, and the Purion XE™ high energy implanter.

About Axcelis: Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at  


Maureen Hart (editorial/media) 978.787.4266 Doug Lawson (investor relations) 978.787.9552

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SOURCE Axcelis Technologies, Inc.