Axcelis Receives Order For Optima HDx High Current Implanter From Leading Foundry

Production Proven Platform Provides Unprecedented Carbon Source Life Performance for Powerful COO Advantage

Jul 25, 2013, 08:00 ET from Axcelis Technologies, Inc.

BEVERLY, Mass., July 25, 2013 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced that it has received an order for its Optima HDx high current implanter from one of the world's leading foundries. The system features the Company's Eterna ELS3 Source, which delivers over 500 hours of source life for carbon and germanium species, for a compelling cost of ownership advantage.

"We're pleased to be able to offer our customers the industry's most advanced ion source technology," said Bill Bintz, Executive Vice President of Product Development, Engineering and Marketing. "The Eterna ELS3 has delivered truly remarkable source life performance in high volume production of carbon applications at this site, providing significant cost savings for the customer. We're excited about this order, and look forward to expanding our high current implant installed base." The Eterna ELS3 includes patent pending hardware and process improvements designed to extend source life by an unprecedented 500% improvement for carbon, and a 500% improvement for germanium applications. The system is available as an option on new Optima HDx tools, as well as an upgrade to installed systems.

The Optima HDx high current implanter provides solutions for device manufacturers' highest dose requirements with the versatility and extendibility to provide solutions beyond today's 2Xnm technology node. The Optima HDx includes the industry's most advanced ion source technology, coupled with Axcelis' innovative wafer temperature control system that maximizes yield and profitability, both of which are critical in today's challenging device manufacturing environment. The Optima HDx delivers this performance with a simple, low cost and highly reliable design, providing a significant advantage over more complex and costly designs. For more information on the innovative Optima HDx and our complete line of ion implantation systems, please visit

About Axcelis: Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. The Company's Internet address is:

Company Contacts:

Maureen Hart (editorial/media) 978.787.4266 Doug Lawson (investor relations) 978.787.9552  

SOURCE Axcelis Technologies, Inc.