Multi-System Follow-On Order Received For Axcelis Optima HDx High Current Implanter

Optima HDx Tool of Record for Next-Gen High Dose, Low Energy Memory Process

Apr 23, 2014, 08:00 ET from Axcelis Technologies, Inc.

BEVERLY, Mass., April 23, 2014 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced it received a follow-on order for the Optima HDx high current implanter from one of the world's leading chipmakers located in the Asia Pacific region.  As process tool of record, the Optima HDx will be used in high volume manufacturing of next generation memory products. The systems shipped in the first quarter.

"We're pleased to collaborate with this important customer on their next generation processes, and expand our installed base of Optima HDx implanters," said John Aldeborgh, executive vice president, customer operations.  "During the evaluation for this new process, the Optima HDx demonstrated a >20% productivity advantage over the competition.  Our customer recognized the Optima HDx's advantages of high production beam current and industry-leading source life."  He continued, "The Optima HDx's spot beam technology provides the robust capacity to meet today's production demands, and allows for the easy transfer of proven process recipes to the innovative Purion H as customers transition to advanced planar and 3D devices."

The Optima HDx The Optima HDx high current implanter provides solutions for device manufacturers' highest dose requirements with the versatility and extendibility to provide solutions for today's 2Xnm technology node. The Optima HDx includes the industry's most advanced ion source technology, coupled with Axcelis' innovative wafer temperature control system that maximizes yield and profitability, both of which are critical in today's challenging device manufacturing environment. The Optima HDx delivers this performance with a simple, low cost and highly reliable design, providing a significant advantage over more complex and costly designs. For more information on the Optima HDx and our complete line of innovative Purion ion implantation systems, please visit

About Axcelis: Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. The Company's Internet address is:

Company Contacts: Maureen Hart (editorial/media) 978.787.4266 Doug Lawson (investor relations) 978.787.9552

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SOURCE Axcelis Technologies, Inc.