System Delivers Significant Advantages in Performance and Yield

BEVERLY, Mass., Oct. 11, 2011 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that it has received an order for the Company's Optima HDx™ high current implanter from one of the world's largest device manufacturers. The first system shipped in September and will be used to enable production of leading edge CMOS Image Sensor devices.

"We're excited to expand our presence with one of the most innovative device manufacturers. This new order emphasizes the performance advantages that chipmakers can realize with the Optima HDx," said CEO and Chairman Mary Puma.  "Customers are seeing dramatic results in production, achieving higher yields and improving overall profitability, due to the system's precise process control and high productivity.  The system's enabling spot beam technology combined with its proprietary wafer temperature control delivers industry leading performance critical for today's challenging device manufacturing environment."

The Optima HDx high current implanter provides solutions for device manufacturing's lowest energy applications and highest dose requirements with the versatility and extendibility to provide solutions beyond the 22nm technology node. For more information on the innovative Optima HDx and our complete line of ion implantation systems, please visit www.axcelis.com.

Safe Harbor Statement

This document contains forward-looking statements under the SEC safe harbor provisions. These statements, which include our expectations for orders and shipments, are based on management's current expectations and should be viewed with caution. They are subject to various risks and uncertainties, many of which are outside the control of the Company, including customer timing requests, the continuing demand for semiconductor equipment, continuity of business relationships with and purchases by customers, competitive pressure on sales and pricing, and global economic, political and financial conditions. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K filed by Axcelis and in other documents filed from time to time with the Securities and Exchange Commission.

Axcelis Technologies, Inc. (Nasdaq: ACLS), headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation and cleaning systems. The company's Internet address is: www.axcelis.com.

Company Contacts:
Maureen Hart (editorial/media) 978.787.4266
Maureen.hart@axcelis.com

Jay Zager (financial community) 978.787.9408
jay.zager@axcelis.com

SOURCE Axcelis Technologies, Inc.

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