BEVERLY, Mass., May 25, 2016 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that it has received its first order for the Purion EXE™, an extended energy range option for its industry leading Purion XE™ high energy implanter. The 200mm Purion EXE will be used to support the production of specialty devices to meet the growing demand in the mobile and IoT markets. The system is scheduled to ship in the second quarter.
John Aldeborgh, executive vice president, customer operations, commented, "We're excited to be able to offer customers a new system with the ability to perform ultra-high energy implants, with extremely precise and deep doping profiles, on the industry leading Purion XE platform. The applications for these implants are expanding in the specialty device markets, providing strong opportunities for the Purion XE platform."
Bill Bintz, executive vice president, engineering and marketing, commented, "The Purion platform's common architecture, in conjunction with its LINAC technology, has allowed Axcelis to rapidly expand the capabilities of our high energy product line. As a result, we are able to meet the emerging needs of device manufacturers, while simultaneously delivering exceptional reliability, manufacturing flexibility and capital efficiency. The product line is available in both 200mm and 300mm configurations."
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.
Maureen Hart (editorial/media) 978.787.4266
Doug Lawson (investor relations) 978.787.9552
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SOURCE Axcelis Technologies, Inc.