2014

Axcelis Receives Follow-on Order For Optima HDx High Current Implanter Production Proven Platform Demonstrates Advantages in Process Performance, Productivity and Capital Efficiency

BEVERLY, Mass., June 5, 2013 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced that it has received a follow-on order for its Optima HDx high current implanter from one of the world's leading chipmakers located in the Asia Pacific region. The customer has a very large installed base of Optima HDx implanters, where the systems are being used in high volume manufacturing of leading edge memory products, as well as for the development of next generation memory devices.

"We're excited that the customer has selected the Optima HDx system with damage engineering capabilities to expand their capacity. It is testament to the confidence our customer has in the Optima HDx's process and productivity advantages," said Mary Puma, chairman and CEO of Axcelis Technologies. "The Optima HDx includes the industry's most advanced ion source technology, the Eterna ELS3, coupled with Axcelis' innovative wafer temperature control system that maximizes yield and profitability, both of which are critical in today's challenging device manufacturing environment. The Optima HDx delivers this performance with a simple, low cost and highly reliable design, providing a significant advantage over more complex and costly competing designs."

The Optima HDx high current implanter provides solutions for device manufacturers highest dose requirements with the versatility and extendibility to provide solutions beyond today's 2Xnm technology node. For more information on the innovative Optima HDx and our complete line of ion implantation systems, please visit www.axcelis.com.

About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. The Company's Internet address is: www.axcelis.com.

Company Contacts:

Maureen Hart (editorial/media) 978.787.4266
Maureen.hart@axcelis.com

Jay Zager (financial community) 978.787.9408
jay.zager@axcelis.com

SOURCE Axcelis Technologies, Inc.



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