KLA-Tencor Announces X5.2™ and Teron™ 611 Reticle Inspection Systems Total ReQual™ Solution for Reticle Monitoring in the IC Fab

MILPITAS, Calif., Sept. 5, 2012 /PRNewswire/ -- Today KLA-Tencor Corporation (NASDAQ: KLAC) announced two new additions to the company's IC fab-based reticle inspection portfolio: the X5.2 and Teron 611 systems. As the latest offering in the successful 5XX product line, the new X5.2 applies its high performance to capture defects and pattern degradation on masks currently in production, with extended capability for the upcoming 20nm node. The Teron 611 is designed for the 20nm node and beyond, offering technology-enabling sensitivity to inspect masks at the leading edge of IC production.

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(Photo: http://photos.prnewswire.com/prnh/20120905/SF67763-b)

"New cleaning processes and smaller pattern features on the mask have altered the landscape for reticle monitoring in the fab," said Yalin Xiong, Ph.D., general manager of the Reticle Products Division at KLA-Tencor. "Primary and assist pattern features are not only smaller at the 20nm node, but the distinction between them is becoming blurred—making it more difficult to determine whether a defect will affect the pattern on the wafer. Our customers are also increasingly concerned with the effect of mask pattern degradation on the process window—a result of repeated cleaning and exposure. We have designed the X5.2 and Teron 611 inspection systems to comprise a Total ReQual solution, monitoring defectivity and pattern degradation down to the 20nm node and beyond."

The extensive capabilities of the X5.2 and Teron 611 tools include:

  • Technology-enabling sensitivity for inspection of the most critical masks at the 20nm node (Teron 611);
  • High sensitivity to  the remainder of the 20nm mask set and full mask sets at the 28nm and larger design nodes (X5.2);
  • Early detection of pattern degradation from cleaning or exposure, designed to alert engineers to process window narrowing before the point of collapse;
  • Fifth-generation STARlight® inspection mode for full area coverage on multi- and single-die reticles; preferential defect capture on edges and sidewalls of pattern; and dependable capture of defects in open areas;
  • Advanced algorithms providing reliable discrimination between nuisance events and defects of interest (DOI);
  • Highly flexible architecture allowing adjustment of sensitivity and speed to address a fab's changing product mix, product life cycle and yield status;
  • Optional configuration providing industry-leading throughput for advanced design nodes (X5.2); and
  • Unique connectivity to KLA-Tencor's e-beam defect review platform, the eDR-7000, enhancing speed and accuracy of on-wafer defect population profiling.

 

X5.2 and Teron 611 systems have been shipped to leading chip manufacturers in the United States and Asia, where they are being used in 28nm production and 20nm pilot lines. To maintain high performance and productivity, the X5.2 and Teron 611 tools are backed by KLA-Tencor's global, comprehensive service network. For more information on KLA-Tencor's IC fab-based reticle inspection tools, please visit the product web pages at: http://www.kla-tencor.com/front-end-defect-inspection/rapid-ic-fab-series.html.

About KLA-Tencor:
KLA-Tencor Corporation, a leading provider of process control and yield management solutions, partners with customers around the world to develop state-of-the-art inspection and metrology technologies. These technologies serve the semiconductor, data storage, LED, photovoltaic, and other related nanoelectronics industries. With a portfolio of industry-standard products and a team of world-class engineers and scientists, the company has created superior solutions for its customers for more than 35 years. Headquartered in Milpitas, Calif., KLA-Tencor has dedicated customer operations and service centers around the world. Additional information may be found at www.kla-tencor.com (KLAC-P).

Forward-Looking Statements:
Statements in this press release other than historical facts, such as statements regarding the expected performance of the X5.2 or Teron 611 systems, trends in the semiconductor industry and the anticipated challenges associated with them, expected uses of the X5.2 or Teron 611 tools by KLA-Tencor's customers, expected extendibility of the X5.2 or Teron 611 tools to accommodate new functionality, and the anticipated cost, operational and other benefits realizable by users of the X5.2 or Teron 611 tools, are forward-looking statements, and are subject to the Safe Harbor provisions created by the Private Securities Litigation Reform Act of 1995. These forward-looking statements are based on current information and expectations, and involve a number of risks and uncertainties. Actual results may differ materially from those projected in such statements due to various factors, including delays in the adoption of new technologies (whether due to cost or performance issues or otherwise), the introduction of competing products by other companies or unanticipated technological challenges or limitations that affect the implementation, performance or use of KLA-Tencor's products.

SOURCE KLA-Tencor Corporation



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