MEMS Equipment Sales Are Strong at Akrion Systems

ALLENTOWN, Pa., July 6, 2011 /PRNewswire/ -- Akrion Systems LLC ("Akrion Systems"), a supplier of advanced surface preparation processes and equipment for microelectronics and solar device manufacturers, has received orders from MEMS manufacturers valued at over $20 (USD) million that will ship this year.  

The company will ship GAMA wet stations to the Centre de Collaboration MiQro Innovation (C2MI) in Bromont Technoparc, Quebec, Canada as announced in a previous news release and to major suppliers of MEMS devices in Europe and Southeast Asia.  All of the equipment is scheduled to be installed by the end of this year.

Akrion Systems has demonstrated wet process expertise by developing innovative equipment and methods for controlled and uniform silicon etching, enhanced particle removal, and for the processing and drying of wafers with high aspect ratio features.  Among the company's innovations are i-Clean™ in situ processing, patented ICE-1™ chemical concentration control and the patented DIO3™ ozonated-water cleaning method which replaces sulfuric acid for organic removal applications.  Versatile GAMA batch-immersion systems utilizing these inventions can be found in the fabs of many of the leading MEMS manufacturers worldwide.  

Michael Ioannou, CEO and president of Akrion Systems said, "Sales have been brisk for us this year. In particular, we have experienced a major increase in orders from MEMS customers.  New and repeat customers recognize the value we add with our extensive experience and process knowledge to help them find solutions to the many challenges associated with the manufacturing of advanced MEMS devices."

About Akrion Systems

Akrion Systems provides advanced surface preparation process solutions and systems, including single-wafer and batch-immersion cleaning tools for the microelectronic, photovoltaic and display industries. Akrion Systems' customers produce a diverse range of products, including solar cells, integrated circuits for DRAM, Flash, Logic and MEMS as well as new and reclaimed semiconductor wafers, flat panel displays, and photomasks. The company's headquarters in Allentown, Pennsylvania includes a class-1 clean room for process development and an ISO 9001:2000 compliant production facility. For further information, please visit the Akrion Systems web site: http://www.akrionsystems.com.

SOURCE Akrion Systems



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